From mahnaz at snf.stanford.edu  Mon Oct  4 15:20:16 2004
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Mon, 4 Oct 2004 15:20:16 -0700
Subject: Problem evalign SNF 2004-10-04 15:20:15: check lamp uniformity
Message-ID: <mailman.446.1357938355.25704.evalign-pcs@snf.stanford.edu>




From martinez at snf.stanford.edu  Mon Oct  4 15:57:03 2004
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Mon, 4 Oct 2004 15:57:03 -0700
Subject: Problem evalign SNF 2004-10-04 15:20:15: check lamp uniformity
Message-ID: <mailman.447.1357938355.25704.evalign-pcs@snf.stanford.edu>

calibrated lamp
CI1 = 15mw/cm2
uniformity = 1.0 %



From junbo at snf.stanford.edu  Wed Oct 27 17:24:19 2004
From: junbo at snf.stanford.edu (junbo at snf.stanford.edu)
Date: Wed, 27 Oct 2004 17:24:19 -0700
Subject: Comment evalign SNF 2004-10-27 17:24:18: vacuum sensor  error
Message-ID: <mailman.448.1357938355.25704.evalign-pcs@snf.stanford.edu>




From hansj at snf.stanford.edu  Wed Oct 27 18:53:07 2004
From: hansj at snf.stanford.edu (hansj at snf.stanford.edu)
Date: Wed, 27 Oct 2004 18:53:07 -0700
Subject: Problem evalign SNF 2004-10-27 18:53:07: vacuum sensor problem
Message-ID: <mailman.449.1357938355.25704.evalign-pcs@snf.stanford.edu>

after adjusting the mask, it showed "vacuum sensor problem, retry?". Cannot continue the process.



From vilanova at snf.stanford.edu  Thu Oct 28 07:45:06 2004
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 28 Oct 2004 07:45:06 -0700
Subject: Comment evalign SNF 2004-10-27 17:24:18: vacuum sensor  error
Message-ID: <mailman.450.1357938355.25704.evalign-pcs@snf.stanford.edu>

load mask , exposed a wafer ,  NO problem found , othe than
the users did not set the micrometers to the right  position. 



From vilanova at snf.stanford.edu  Thu Oct 28 07:45:27 2004
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 28 Oct 2004 07:45:27 -0700
Subject: Problem evalign SNF 2004-10-27 18:53:07: vacuum sensor problem
Message-ID: <mailman.451.1357938355.25704.evalign-pcs@snf.stanford.edu>

system working fine, exposed a wafer, ready to use. 



From kychen51 at snf.stanford.edu  Sat Oct 30 21:51:37 2004
From: kychen51 at snf.stanford.edu (kychen51 at snf.stanford.edu)
Date: Sat, 30 Oct 2004 21:51:37 -0700
Subject: Comment evalign SNF 2004-10-30 21:51:36: vaccuum sensor error
Message-ID: <mailman.452.1357938355.25704.evalign-pcs@snf.stanford.edu>

Vaccuum sensor error dialog appear after finish adjusting mask.  Cannot continue after repeated retries.



From xpxie at snf.stanford.edu  Sat Oct 30 22:34:52 2004
From: xpxie at snf.stanford.edu (xpxie at snf.stanford.edu)
Date: Sat, 30 Oct 2004 22:34:52 -0700
Subject: Problem evalign SNF 2004-10-30 22:34:51: Vacuum sensor error
Message-ID: <mailman.453.1357938355.25704.evalign-pcs@snf.stanford.edu>