From crichter at snf.stanford.edu Mon Sep 13 11:58:01 2004 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Mon, 13 Sep 2004 11:58:01 -0700 Subject: Problem evalign SNF 2004-09-13 11:58:00: backside alignment illumimation getting dimmer Message-ID: From crichter at snf.stanford.edu Mon Sep 13 11:59:34 2004 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Mon, 13 Sep 2004 11:59:34 -0700 Subject: Problem evalign SNF 2004-09-13 11:59:33: WEC contact force less than 0.5bar Message-ID: audible alarm goes off during exposure From martinez at snf.stanford.edu Mon Sep 13 14:12:48 2004 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mon, 13 Sep 2004 14:12:48 -0700 Subject: Problem evalign SNF 2004-09-13 11:59:33: WEC contact force less than 0.5bar Message-ID: adj wec pressure, replaced & calibrated lamp From vilanova at snf.stanford.edu Tue Sep 14 09:44:28 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 14 Sep 2004 09:44:28 -0700 Subject: Problem evalign SNF 2004-09-13 11:58:00: backside alignment illumimation getting dimmer Message-ID: I couldnt repeat the problem , bottom side illumination working ok . From crichter at snf.stanford.edu Thu Sep 16 18:51:05 2004 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Thu, 16 Sep 2004 18:51:05 -0700 Subject: Comment evalign SNF 2004-09-16 18:51:05: exposure times longer for 7um resist Message-ID: A few days ago I used an exposure time of 8 seconds for resist at a nominal thickness of 7microns. Today, it takes 14.5 seconds to clear all of the resist using the 7 micron developer recipe on the svgdev track. From vilanova at snf.stanford.edu Mon Sep 27 07:19:08 2004 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 27 Sep 2004 07:19:08 -0700 Subject: Comment evalign SNF 2004-09-16 18:51:05: exposure times longer for 7um resist Message-ID: comment cleared