From martinez at snf.stanford.edu Mon Aug 1 08:41:20 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Mon, 1 Aug 2005 08:41:20 -0700 Subject: Problem evalign SNF 2005-07-29 18:56:10: no light Message-ID: expose pamp is on no problem found From mehdij at snf.stanford.edu Thu Aug 4 01:22:29 2005 From: mehdij at snf.stanford.edu (mehdij at snf.stanford.edu) Date: Thu, 4 Aug 2005 01:22:29 -0700 Subject: Problem evalign SNF 2005-08-04 01:22:28: problem with EValigner Message-ID: the machine is locked up and doesn't operate. Mehdi From mehdij at snf.stanford.edu Thu Aug 4 02:11:12 2005 From: mehdij at snf.stanford.edu (mehdij at snf.stanford.edu) Date: Thu, 4 Aug 2005 02:11:12 -0700 Subject: Shutdown evalign SNF 2005-08-04 02:11:12: evalign problem Message-ID: The machine is locked and doesn't function. From vilanova at snf.stanford.edu Thu Aug 4 07:17:32 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 4 Aug 2005 07:17:32 -0700 Subject: Shutdown evalign SNF 2005-08-04 02:11:12: evalign problem Message-ID: Re- initialized system , tested ok , ready to use. please do not turn off the power supply, power supply has nothing to do with the system software been stuck. From vilanova at snf.stanford.edu Thu Aug 4 07:18:28 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 4 Aug 2005 07:18:28 -0700 Subject: Problem evalign SNF 2005-08-04 01:22:28: problem with EValigner Message-ID: re -initialized system , ok to use. From martinez at snf.stanford.edu Fri Aug 12 11:43:59 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Fri, 12 Aug 2005 11:43:59 -0700 Subject: Shutdown evalign SNF 2005-08-12 11:43:58: wec replacement Message-ID: From martinez at snf.stanford.edu Tue Aug 16 16:38:54 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Tue, 16 Aug 2005 16:38:54 -0700 Subject: Shutdown evalign SNF 2005-08-12 11:43:58: wec replacement Message-ID: changing status to problem still has slight shift in Y From nshah at snf.stanford.edu Tue Aug 16 18:05:44 2005 From: nshah at snf.stanford.edu (nshah at snf.stanford.edu) Date: Tue, 16 Aug 2005 18:05:44 -0700 Subject: Comment evalign SNF 2005-08-16 18:05:43: RE: alignment drift Message-ID: I just used the evalign after Mike fixed it, and while he said he saw some Y-shift between separation and contact, I did not see that happen. I did see an occasional drift in X whenever I moved the Scan Optic in Y. It was no more than 1 micron. My smallest feature was 10 microns, so none of this affected me too much. From ForEducation at academic-software-outlet.com Fri Aug 19 01:50:43 2005 From: ForEducation at academic-software-outlet.com (Edu-Software Sales) Date: Fri, 19 Aug 2005 01:50:43 -0700 Subject: Deep Software Discounts for Student, Teachers, Staff, Schools Message-ID: Adobe Creative Suite Premium CS2 at 60% OFF, Macromedia Dreamvweaver MX 2004 at 67% OFF, Microsoft Office 2003 Standard at 63% OFF, Adobe Illustrator CS2 12.0 at 76% OFF, EndNote 8.0 at 67% OFF, !!!!!!!!!!!!!SUMMER BREAK SALE!!!!!!!!!!!!!!!!!! *** EXCLUSIVELY available to Qualified Students, Faculty, and Staff of K-12 and Higher Education institutions. 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However, if you do not wish to recieve any more offer from CPE, please click on the following link: http://www.academic-software-outlet.com/rem.asp?a=remv&e=evalign-pcs at snf.stanford.edu Or call 800-679-7007 and ask to be deleted from our list. __________________________ Computer Products for Education 5325 140th Avenue North Clearwater, Florida 33760 Tel: 800-679-7007 / 727-530-1709 Fax: 800-679-6996 / 727-530-7994 ___________________ THANK YOU AND HAVE A NICE DAY!! 1512042332225 From crichter at snf.stanford.edu Fri Aug 19 12:36:17 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Fri, 19 Aug 2005 12:36:17 -0700 Subject: Problem evalign SNF 2005-08-19 12:36:16: can't get optics to show mask alignment marks with the wafer markers clearly Message-ID: No matter how close the wafer is to the mask, I can't get both alignment markers (mask to wafer ) to show up clearly. Its fuzzy. the y-axis stage is loose and unstable. From crichter at snf.stanford.edu Fri Aug 19 12:37:03 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Fri, 19 Aug 2005 12:37:03 -0700 Subject: Problem evalign SNF 2005-08-19 12:37:02: focus knob sometimes doesn't work when trying to focus on alignment marks Message-ID: From martinez at snf.stanford.edu Thu Aug 25 11:03:28 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Thu, 25 Aug 2005 11:03:28 -0700 Subject: Shutdown evalign SNF 2005-08-25 11:03:28: shutdown ev620 Message-ID: repairs in progress From martinez at snf.stanford.edu Thu Aug 25 17:20:59 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Thu, 25 Aug 2005 17:20:59 -0700 Subject: Shutdown evalign SNF 2005-08-25 11:03:28: shutdown ev620 Message-ID: repairs completed wafer shift <2um resolution = 1.0um hard contact 3612 1.0um From martinez at snf.stanford.edu Thu Aug 25 17:21:26 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Thu, 25 Aug 2005 17:21:26 -0700 Subject: Problem evalign SNF 2005-08-19 12:37:02: focus knob sometimes doesn't work when trying to focus on alignment marks Message-ID: problem cleared From martinez at snf.stanford.edu Thu Aug 25 17:22:00 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Thu, 25 Aug 2005 17:22:00 -0700 Subject: Problem evalign SNF 2005-08-19 12:36:16: can't get optics to show mask alignment marks with the wafer markers clearly Message-ID: wec leveled problem cleared From martinez at snf.stanford.edu Thu Aug 25 17:22:48 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Thu, 25 Aug 2005 17:22:48 -0700 Subject: Problem evalign SNF 2005-07-30 12:19:58: ANODIC recp. top wafer shifts from crosshairs Message-ID: tray position adjusted wec has been leveled problem cleared From hopcroft at snf.stanford.edu Tue Aug 30 13:23:00 2005 From: hopcroft at snf.stanford.edu (hopcroft at snf.stanford.edu) Date: Tue, 30 Aug 2005 13:23:00 -0700 Subject: Comment evalign SNF 2005-08-30 13:22:59: alignment knobs feel loose... Message-ID: The x/y/theta knobs feel "loose" today- there is a slight lag between turning them and the wafer moving. Also some crosstalk between knobs- turn x, it jumps a little in y. No shift when going in and out of contact, though.