Comment evalign SNF 2005-08-16 18:05:43: RE: alignment drift
nshah at snf.stanford.edu
nshah at snf.stanford.edu
Tue Aug 16 18:05:44 PDT 2005
I just used the evalign after Mike fixed it, and while he said he saw some Y-shift between separation and contact, I did not see that happen. I did see an occasional drift in X whenever I moved the Scan Optic in Y. It was no more than 1 micron. My smallest feature was 10 microns, so none of this affected me too much.
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