Problem evalign SNF 2005-08-19 12:36:16: can't get optics to show mask alignment marks with the wafer markers clearly

crichter at snf.stanford.edu crichter at snf.stanford.edu
Fri Aug 19 12:36:17 PDT 2005


No matter how close the wafer is to the mask, I can't get both alignment markers (mask to wafer ) to show up clearly. Its fuzzy. the y-axis stage is loose and unstable. 




More information about the evalign-pcs mailing list