Comment evalign SNF 2005-08-30 13:22:59: alignment knobs feel loose...

hopcroft at snf.stanford.edu hopcroft at snf.stanford.edu
Tue Aug 30 13:23:00 PDT 2005


The x/y/theta knobs feel "loose" today- there is a slight lag between turning them and the wafer moving. Also some crosstalk between knobs- turn x, it jumps a little in y. No shift when going in and out of contact, though.




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