Problem evalign SNF 2005-12-15 13:23:17: bond chuck missing vacuum seal screw

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Thu Dec 15 13:23:17 PST 2005


Can't pull vacuum on top wafer. Chuck drops wafer immediatelyafter raising chuck after top wafer load.  Chuck is missing a screw that seals the chuck vacuum and holds the chuck in place.




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