From ericp at snf.stanford.edu Thu Jan 6 17:48:33 2005 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Thu, 6 Jan 2005 17:48:33 -0800 Subject: Problem evalign SNF 2005-01-06 17:48:32: Major shift Message-ID: Using Large Gap Align, The mask image shifts ~20 micron between the capture and the actual alignment. Unable to use. From carlos at snf.stanford.edu Fri Jan 14 15:09:51 2005 From: carlos at snf.stanford.edu (carlos at snf.stanford.edu) Date: Fri, 14 Jan 2005 15:09:51 -0800 Subject: Comment evalign SNF 2005-01-14 15:09:50: beeping Message-ID: Makes short beeping noise during first few seconds of using flood mode From kevhuang at snf.stanford.edu Mon Jan 17 15:34:00 2005 From: kevhuang at snf.stanford.edu (kevhuang at snf.stanford.edu) Date: Mon, 17 Jan 2005 15:34:00 -0800 Subject: Problem evalign SNF 2005-01-17 15:34:00: system freezes after saving topside recipe Message-ID: From vilanova at snf.stanford.edu Tue Jan 18 07:50:09 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 18 Jan 2005 07:50:09 -0800 Subject: Comment evalign SNF 2005-01-14 15:09:50: beeping Message-ID: Re-calibrated lamp no more noise , ok to use. From vilanova at snf.stanford.edu Tue Jan 18 07:50:44 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 18 Jan 2005 07:50:44 -0800 Subject: Problem evalign SNF 2005-01-17 15:34:00: system freezes after saving topside recipe Message-ID: System worked fine for me ,I could not repeat the problem , ok to use. :-) From malekos at snf.stanford.edu Wed Jan 19 12:57:59 2005 From: malekos at snf.stanford.edu (malekos at snf.stanford.edu) Date: Wed, 19 Jan 2005 12:57:59 -0800 Subject: Problem evalign SNF 2005-01-19 12:57:59: System froze before I could load mask Message-ID: From martinez at snf.stanford.edu Wed Jan 19 13:30:36 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Wed, 19 Jan 2005 13:30:36 -0800 Subject: Problem evalign SNF 2005-01-19 12:57:59: System froze before I could load mask Message-ID: reset computer, initialized system. From martinez at snf.stanford.edu Thu Jan 20 14:56:32 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Thu, 20 Jan 2005 14:56:32 -0800 Subject: Problem evalign SNF 2005-01-06 17:48:32: Major shift Message-ID: ok to use per mahnaz. objectives not properly positioned From lindaw at snf.stanford.edu Sat Jan 22 11:17:20 2005 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 22 Jan 2005 11:17:20 -0800 Subject: Problem evalign SNF 2005-01-22 11:17:19: bottom left objective will not focus above 857 Message-ID: During ANODIC recipe, the left bottom objective will not focus above 857. The right objective can focus to the limit of 950. Can't align my fused silica wafers. From lindaw at snf.stanford.edu Sat Jan 22 11:44:20 2005 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 22 Jan 2005 11:44:20 -0800 Subject: Problem evalign SNF 2005-01-22 11:44:19: wafers still in contact when going from cont to sep Message-ID: In anodic recipe, the wafers appear to still be in contact when going from contact to separation. I was able to align .5mm wafers, but not 1mm wafers due to bottom left objective focus travel limit of 857 instead of software limit of 950units. From carlos at snf.stanford.edu Wed Jan 26 15:05:37 2005 From: carlos at snf.stanford.edu (carlos at snf.stanford.edu) Date: Wed, 26 Jan 2005 15:05:37 -0800 Subject: Comment evalign SNF 2005-01-26 15:05:37: makes beeping noise Message-ID: using flood and makes beeping noise when exposure starts From vilanova at snf.stanford.edu Fri Jan 28 10:33:01 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 28 Jan 2005 10:33:01 -0800 Subject: Comment evalign SNF 2005-01-26 15:05:37: makes beeping noise Message-ID: calibrated lamp , NO more beeping noise. ok to use