Problem evalign SNF 2005-01-22 11:44:19: wafers still in contact when going from cont to sep

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Sat Jan 22 11:44:20 PST 2005


In anodic recipe, the wafers appear to still be in contact when going from contact to separation.  I was able to align .5mm wafers, but not 1mm wafers due to bottom left objective focus travel limit of 857 instead of software limit of 950units.




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