From cbaxter at snf.stanford.edu Tue Jul 12 20:46:17 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 12 Jul 2005 20:46:17 -0700 Subject: Shutdown evalign SNF 2005-07-12 20:46:17: Bad WEC Message-ID: After the system upgrade, Mike(f/s) notice wedge was not locking in place. Mike, said WEC will need to be rebuild. From rcrane at snf.stanford.edu Thu Jul 14 07:01:54 2005 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Thu, 14 Jul 2005 07:01:54 -0700 Subject: Shutdown evalign SNF 2005-07-12 20:46:17: Bad WEC Message-ID: EV field service cleared problem From bchui at snf.stanford.edu Fri Jul 15 00:02:49 2005 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Fri, 15 Jul 2005 00:02:49 -0700 Subject: Problem evalign SNF 2005-07-15 00:02:48: Machine froze while initializing Message-ID: Also, the previous user had not parked or logged off. From vilanova at snf.stanford.edu Fri Jul 15 06:45:05 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 15 Jul 2005 06:45:05 -0700 Subject: Problem evalign SNF 2005-07-15 00:02:48: Machine froze while initializing Message-ID: Initialized PC, parked mask holder, ok to use. From crichter at snf.stanford.edu Sun Jul 17 14:56:01 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Sun, 17 Jul 2005 14:56:01 -0700 Subject: Problem evalign SNF 2005-07-17 14:56:01: wafer chuck moves to the side when pressing Sep/Cont Message-ID: After Exposure, my alignment is off about 100 microns From vilanova at snf.stanford.edu Mon Jul 18 08:17:20 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 18 Jul 2005 08:17:20 -0700 Subject: Problem evalign SNF 2005-07-17 14:56:01: wafer chuck moves to the side when pressing Sep/Cont Message-ID: Exposed wafers , Could not repeat problem , Ok to use. From ginel at snf.stanford.edu Mon Jul 18 15:56:03 2005 From: ginel at snf.stanford.edu (ginel at snf.stanford.edu) Date: Mon, 18 Jul 2005 15:56:03 -0700 Subject: Problem evalign SNF 2005-07-18 15:56:03: right objective only tenuously attached Message-ID: Something has been partially unscrewed which holds on the right objective housing. It does not turn properly, sit in the correct position, or provide for stable viewing. From ginel at snf.stanford.edu Mon Jul 18 16:04:02 2005 From: ginel at snf.stanford.edu (ginel at snf.stanford.edu) Date: Mon, 18 Jul 2005 16:04:02 -0700 Subject: Problem evalign SNF 2005-07-18 16:04:01: correction: LEFT objective near falling out Message-ID: Strongly recommend not using evalign as objective might fall on mask or wafer. From vilanova at snf.stanford.edu Tue Jul 19 07:49:37 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 19 Jul 2005 07:49:37 -0700 Subject: Shutdown evalign SNF 2005-07-19 07:49:37: Work In progress ........ Message-ID: From vilanova at snf.stanford.edu Tue Jul 19 14:00:11 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 19 Jul 2005 14:00:11 -0700 Subject: Shutdown evalign SNF 2005-07-19 07:49:37: Work In progress ........ Message-ID: System good to use ONLY for backside alignment due to a part that is missing from the top turret ( Objectives Holder ) From vilanova at snf.stanford.edu Thu Jul 21 09:47:01 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 21 Jul 2005 09:47:01 -0700 Subject: Problem evalign SNF 2005-07-18 15:56:03: right objective only tenuously attached Message-ID: Left Objective back from E V , adjusted Turrel , ok to use. From vilanova at snf.stanford.edu Thu Jul 21 09:47:32 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 21 Jul 2005 09:47:32 -0700 Subject: Problem evalign SNF 2005-07-18 16:04:01: correction: LEFT objective near falling out Message-ID: Adjusted Turrel , ok to use. From crichter at snf.stanford.edu Thu Jul 21 13:03:36 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Thu, 21 Jul 2005 13:03:36 -0700 Subject: Problem evalign SNF 2005-07-21 13:03:35: Still have misalignment problems Message-ID: I am using the backside alignment and can still see the wafer move to the side as I press STEP/CONT. I adjust the wafer slightly away from the mask alignment marks until the alignment looks satisfactory. After exposure and developing, the alignment turned out to be off by about 100um From mahnaz at snf.stanford.edu Thu Jul 28 16:56:37 2005 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 28 Jul 2005 16:56:37 -0700 Subject: Problem evalign SNF 2005-07-21 13:03:35: Still have misalignment problems Message-ID: We ran wafers and checked with IR microscope and it looks very good. From mahnaz at snf.stanford.edu Thu Jul 28 16:57:51 2005 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 28 Jul 2005 16:57:51 -0700 Subject: Comment evalign SNF 2005-07-28 16:57:51: Ealier today I saw slight shift Message-ID: When doing BSA, Mike has made some adjustment. Let me know if you see any issues with the system. From crichter at snf.stanford.edu Fri Jul 29 18:13:55 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Fri, 29 Jul 2005 18:13:55 -0700 Subject: Comment evalign SNF 2005-07-29 18:13:51: User ginel had mask stuck in evaligner Message-ID: Mario gave instructions by phone while I was executing them to restart the pc. Although some files were fixed during the Scan Disk operation, the Scan Disk reported other problems that were not typical during a reset. Mario came by to SNF this evening to help, but Ginel found Mahnaz and got her mask out and the system rebooted. Thanks!! Claudia From crichter at snf.stanford.edu Fri Jul 29 18:20:42 2005 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Fri, 29 Jul 2005 18:20:42 -0700 Subject: Comment evalign SNF 2005-07-29 18:20:38: Backside Alignment Works Great Message-ID: I did a backside alignment on 5 wafers today and got very good results. The accuracy was up to 2um, sometimes better than 2um. The alignment accuracy was checked with an IR microscope against the alignment resolution markers I had in the frontsides of my wafers. A 2 micron accuracy is within the accuracy range for backside alignment...usually the specs say 3 microns. From ginel at snf.stanford.edu Fri Jul 29 18:56:11 2005 From: ginel at snf.stanford.edu (ginel at snf.stanford.edu) Date: Fri, 29 Jul 2005 18:56:11 -0700 Subject: Problem evalign SNF 2005-07-29 18:56:10: no light Message-ID: I think the bulb is burnt out. Certainly, it is not exposing. From lindaw at snf.stanford.edu Fri Jul 29 22:13:09 2005 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 29 Jul 2005 22:13:09 -0700 Subject: Comment evalign SNF 2005-07-29 22:13:09: backside alignment worked well for me Message-ID: I forgot to comment earlier, but I found that during my wafer to wafer bond alignment (fused silica, so I could see if there were any shift in the crosshairs with the top wafer in ANODIC recipe) there was no visible shift in the top wafer and the crosshairs. And both the left and right sides were in the same focal plane, so alignment was a joy. Before, the left side was always been separtated enough that the focus had to be adjusted a lot between the top and bottom wafer. I must say that the adjustments Mike did are most appreciated. From lindaw at snf.stanford.edu Sat Jul 30 12:19:59 2005 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 30 Jul 2005 12:19:59 -0700 Subject: Problem evalign SNF 2005-07-30 12:19:58: ANODIC recp. top wafer shifts from crosshairs Message-ID: While aligning my clear wafers for anodic bond, I noticed that while loading the bottom wafer, the top wafer shifted by about 30 um from the crosshairs. This occured on two of my three alignments. during one alignment, the top wafer didn't shift at all when loading the bottom wafer. Don't know if this will affect backside alignment for regular wafers, but user beware.