Problem evalign SNF 2005-07-17 14:56:01: wafer chuck moves to the side when pressing Sep/Cont

crichter at snf.stanford.edu crichter at snf.stanford.edu
Sun Jul 17 14:56:01 PDT 2005

Previous message: Problem evalign SNF 2005-07-15 00:02:48: Machine froze while initializing
Next message: Problem evalign SNF 2005-07-17 14:56:01: wafer chuck moves to the side when pressing Sep/Cont
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

After Exposure, my alignment is off about 100 microns

Previous message: Problem evalign SNF 2005-07-15 00:02:48: Machine froze while initializing
Next message: Problem evalign SNF 2005-07-17 14:56:01: wafer chuck moves to the side when pressing Sep/Cont
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the evalign-pcs mailing list