Problem evalign SNF 2005-07-21 13:03:35: Still have misalignment problems

crichter at crichter at
Thu Jul 21 13:03:36 PDT 2005

I am using the backside alignment and can still see the wafer move to the side as I press STEP/CONT. I adjust the wafer slightly away from the mask alignment marks until the alignment looks satisfactory. After exposure and developing, the alignment turned out to be off by about 100um

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