Problem evalign SNF 2005-07-21 13:03:35: Still have misalignment problems

crichter at snf.stanford.edu crichter at snf.stanford.edu
Thu Jul 21 13:03:36 PDT 2005


I am using the backside alignment and can still see the wafer move to the side as I press STEP/CONT. I adjust the wafer slightly away from the mask alignment marks until the alignment looks satisfactory. After exposure and developing, the alignment turned out to be off by about 100um




More information about the evalign-pcs mailing list