Problem evalign SNF 2005-07-21 13:03:35: Still have misalignment problems

[crichter at snf.stanford.edu]

I am using the backside alignment and can still see the wafer move to the side as I press STEP/CONT. I adjust the wafer slightly away from the mask alignment marks until the alignment looks satisfactory. After exposure and developing, the alignment turned out to be off by about 100um