Comment evalign SNF 2005-07-29 18:20:38: Backside Alignment Works Great

crichter at snf.stanford.edu crichter at snf.stanford.edu
Fri Jul 29 18:20:42 PDT 2005


I did a backside alignment on 5 wafers today and got very good results. The accuracy was up to 2um, sometimes better than 2um. The alignment accuracy was  checked with an IR microscope against the alignment resolution markers I had in the frontsides of my wafers. A 2 micron accuracy is within the accuracy range for backside alignment...usually the specs say 3 microns.




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