From bchui at snf.stanford.edu Thu Jun 2 23:05:27 2005 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Thu, 2 Jun 2005 23:05:27 -0700 Subject: Problem evalign SNF 2005-06-02 23:05:26: backside recipe doesn't work Message-ID: Machine hangs when recipe is started. Displays "Please wait..." and then freezes. From vilanova at snf.stanford.edu Fri Jun 3 07:05:52 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 3 Jun 2005 07:05:52 -0700 Subject: Problem evalign SNF 2005-06-02 23:05:26: backside recipe doesn't work Message-ID: Checked All recipies ,exposed a wafer system working perfectly fine, operator error , ok to use. From bchui at snf.stanford.edu Sat Jun 4 23:44:22 2005 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sat, 4 Jun 2005 23:44:22 -0700 Subject: Problem evalign SNF 2005-06-04 23:44:22: Machine in "locked" state Message-ID: Machine entered "locked" state as I was trying to run the ANODIC recipe. It won't respond to any commands after that. From vilanova at snf.stanford.edu Mon Jun 6 07:13:02 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 6 Jun 2005 07:13:02 -0700 Subject: Problem evalign SNF 2005-06-04 23:44:22: Machine in "locked" state Message-ID: Initialized system , computer , exposed a wafer , ok to use. From xpxie at snf.stanford.edu Wed Jun 22 09:21:31 2005 From: xpxie at snf.stanford.edu (xpxie at snf.stanford.edu) Date: Wed, 22 Jun 2005 09:21:31 -0700 Subject: Problem evalign SNF 2005-06-22 09:21:31: Vacuum sensor error Message-ID: When the mask is loaded, show a dialog of 'vacuum sensor error'. From vilanova at snf.stanford.edu Wed Jun 22 09:53:13 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 22 Jun 2005 09:53:13 -0700 Subject: Problem evalign SNF 2005-06-22 09:21:31: Vacuum sensor error Message-ID: Load mask and wafer , Could not repeat problem , ready to use.