From shott at snf.stanford.edu Fri May 20 06:49:11 2005 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Fri, 20 May 2005 06:49:11 -0700 Subject: Problem evalign SNF 2005-05-20 06:49:10: Message-ID: From vilanova at snf.stanford.edu Fri May 20 07:22:16 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 20 May 2005 07:22:16 -0700 Subject: Problem evalign SNF 2005-05-20 06:49:10: Message-ID: thsi was just probably a coral test, I tested it and everything is Good , ok to use. From kimsora at snf.stanford.edu Mon May 30 19:19:44 2005 From: kimsora at snf.stanford.edu (kimsora at snf.stanford.edu) Date: Mon, 30 May 2005 19:19:44 -0700 Subject: Problem evalign SNF 2005-05-30 19:19:43: vacuum sensor error Message-ID: From martinez at snf.stanford.edu Tue May 31 09:46:54 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Tue, 31 May 2005 09:46:54 -0700 Subject: Problem evalign SNF 2005-05-30 19:19:43: vacuum sensor error Message-ID: cleaned wafer chuck, replaced mask vac oring loaded test mask & wafer