Problem evalign SNF 2005-11-09 12:40:44: wafers stick for hard contact

jameson at snf.stanford.edu jameson at snf.stanford.edu
Wed Nov 9 12:40:45 PST 2005


Did some hard contact today, and my wafers stuck to my mask.  This is the first time I've tried hard contact since the pressure was adjusted, but hard contact used to be OK.  I was very careful cleaning my mask, so residual photoresist on my mask was not the cause of the sticking.




More information about the evalign-pcs mailing list