Problem evalign SNF 2005-11-09 12:40:44: wafers stick for hard contact

jameson at jameson at
Wed Nov 9 12:40:45 PST 2005

Did some hard contact today, and my wafers stuck to my mask.  This is the first time I've tried hard contact since the pressure was adjusted, but hard contact used to be OK.  I was very careful cleaning my mask, so residual photoresist on my mask was not the cause of the sticking.

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