Problem evalign SNF 2005-11-04 17:01:16: not able to resolve 5 um ans less

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Wed Nov 9 16:37:56 PST 2005


I ran one more test
1 um resist exposed at 1 second Resolved 1 um top, center,
flat and 1.5 um on both left and right side.




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