From shwong at snf.stanford.edu Mon Apr 3 17:32:55 2006 From: shwong at snf.stanford.edu (shwong at snf.stanford.edu) Date: Mon, 3 Apr 2006 17:32:55 -0700 Subject: Problem evalign SNF 2006-04-03 17:32:54: evalign problem Message-ID: Hi, The evaligner seems to acting a little strange. After exposing my wafers, it tells me to move the tray out. At this point, usually, the wafer is sitting on the tray. However, today i tried two dummy wafers, and they both were not released and stuck on the mask. At some point later, they were released and fell into the machine. Also, when I move the micrometers, there is a lot of visible drift; for instance if I move the micrometers in y, i can see some drift in x as i move back and forth. From vilanova at snf.stanford.edu Tue Apr 4 08:05:07 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 4 Apr 2006 08:05:07 -0700 Subject: Problem evalign SNF 2006-04-03 17:32:54: evalign problem Message-ID: cleaned mask holder , chuck., Exposed wafers, NO problem found . ready to use. From mehenti at snf.stanford.edu Wed Apr 5 12:53:45 2006 From: mehenti at snf.stanford.edu (mehenti at snf.stanford.edu) Date: Wed, 5 Apr 2006 12:53:45 -0700 Subject: Problem evalign SNF 2006-04-05 12:53:45: cannot disable Message-ID: the evalign "on" sign cannot be shut off. i enabled it at 12:15 and when i finished at 1:45, i went to disable it on coral but found that i was already disabled. the "on" sign remains on despite trying to re-enable and disable it. From vilanova at snf.stanford.edu Wed Apr 5 14:06:23 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 5 Apr 2006 14:06:23 -0700 Subject: Problem evalign SNF 2006-04-05 12:53:45: cannot disable Message-ID: Coral system Failure, Enable and disable working ok now. From kcrabb at snf.stanford.edu Mon Apr 10 13:03:44 2006 From: kcrabb at snf.stanford.edu (kcrabb at snf.stanford.edu) Date: Mon, 10 Apr 2006 13:03:44 -0700 Subject: Problem evalign SNF 2006-04-10 13:03:43: Backside Microscopes Mis-focused Message-ID: When aligning a wafer with the backside pattern, the backside microscope focusing is not synchronized From mahnaz at snf.stanford.edu Mon Apr 10 15:07:47 2006 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 10 Apr 2006 15:07:47 -0700 Subject: Problem evalign SNF 2006-04-10 13:03:43: Backside Microscopes Mis-focused Message-ID: Mario and I tested the system , what I think it happened is either you missed the step to send the chuck in without the waferto focus on the chuck or some times the scan optic button needs to be activated in order to be able to focus on the wafer. We ran a test and no problem found. From chaseonline at chaseonline.chase.com Tue Apr 11 09:04:07 2006 From: chaseonline at chaseonline.chase.com (Chase Card Services Online Services Team) Date: Tue, 11 Apr 2006 18:04:07 +0200 Subject: Your online account has been limited Message-ID: <200604111604.k3BG47J1016884@minden010.server4you.de> An HTML attachment was scrubbed... URL: From okilic at snf.stanford.edu Sat Apr 15 15:00:16 2006 From: okilic at snf.stanford.edu (okilic at snf.stanford.edu) Date: Sat, 15 Apr 2006 15:00:16 -0700 Subject: Problem evalign SNF 2006-04-15 15:00:15: Does not initialize Message-ID: User before me might know about it From vilanova at snf.stanford.edu Mon Apr 17 07:22:44 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 17 Apr 2006 07:22:44 -0700 Subject: Problem evalign SNF 2006-04-15 15:00:15: Does not initialize Message-ID: Re Initialized system , ok to use. From lindaw at snf.stanford.edu Fri Apr 21 12:29:38 2006 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 21 Apr 2006 12:29:38 -0700 Subject: Problem evalign SNF 2006-04-21 12:29:37: left backside objective won't focus Message-ID: I am reaching the focus limit value of 847, but my wafer align marks are not in focus. After removing the bond clamp, the left backside objective is visibly lower than the right object, which I was able to focus on my alignment marks at the normal value around 600. Could a shim be missing, or perhaps the camera body has been pushed down somehow? Help!!! From vilanova at snf.stanford.edu Fri Apr 21 14:17:16 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 21 Apr 2006 14:17:16 -0700 Subject: Problem evalign SNF 2006-04-21 12:29:37: left backside objective won't focus Message-ID: Adjusted left bottom side microscope, tested ok to use.