Problem evalign SNF 2006-04-10 13:03:43: Backside Microscopes Mis-focused

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Mon Apr 10 15:07:47 PDT 2006


Mario and I  tested the system , what I think it happened is 
either you missed the step to send the chuck in without the 
waferto focus on the chuck  or some times the scan optic button needs to be activated  in order to be able to focus on the wafer. We ran a test and no problem found.




More information about the evalign-pcs mailing list