Problem evalign SNF 2006-04-21 12:29:37: left backside objective won't focus

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Fri Apr 21 12:29:38 PDT 2006


I am reaching the focus limit value of 847, but my wafer align marks are not in focus.  After removing the bond clamp, the left backside objective is visibly lower than the right object, which I was able to focus on my alignment marks at the normal value around 600.  Could a shim be missing, or perhaps the camera body has been pushed down somehow?  Help!!!




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