From mahnaz at snf.stanford.edu  Thu Jan  5 10:24:35 2006
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Thu, 5 Jan 2006 10:24:35 -0800
Subject: Problem evalign SNF 2006-01-05 10:24:34: Not able to resolve 
Message-ID: <mailman.576.1357938356.25704.evalign-pcs@snf.stanford.edu>

less than 3 um on right/left side
resolved  1/1.5 um on top, center, bottom.



From praveen at snf.stanford.edu  Thu Jan 19 11:55:53 2006
From: praveen at snf.stanford.edu (praveen at snf.stanford.edu)
Date: Thu, 19 Jan 2006 11:55:53 -0800
Subject: Problem evalign SNF 2006-01-19 11:55:53: Si to Glass alignment
Message-ID: <mailman.577.1357938356.25704.evalign-pcs@snf.stanford.edu>

The evbond chuck is not holding the top Si wafer and the wafer falls on the glass plate



From martinez at snf.stanford.edu  Thu Jan 19 16:24:26 2006
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Thu, 19 Jan 2006 16:24:26 -0800
Subject: Problem evalign SNF 2006-01-19 11:55:53: Si to Glass alignment
Message-ID: <mailman.578.1357938356.25704.evalign-pcs@snf.stanford.edu>

bond chuck installed upside down



From martinez at snf.stanford.edu  Fri Jan 20 10:02:31 2006
From: martinez at snf.stanford.edu (martinez at snf.stanford.edu)
Date: Fri, 20 Jan 2006 10:02:31 -0800
Subject: Problem evalign SNF 2006-01-05 10:24:34: Not able to resolve 
Message-ID: <mailman.579.1357938356.25704.evalign-pcs@snf.stanford.edu>

double checked uniformity, good at 1.48%
brought all pressure regulators down to 0 pressure
then slowly adjusted all to set point. cycled test wafer
all features above 1.5um show good resolution