Problem evalign SNF 2006-01-05 10:24:34: Not able to resolve

martinez at snf.stanford.edu martinez at snf.stanford.edu
Fri Jan 20 10:02:31 PST 2006


double checked uniformity, good at 1.48%
brought all pressure regulators down to 0 pressure
then slowly adjusted all to set point. cycled test wafer
all features above 1.5um show good resolution




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