From lindaw at snf.stanford.edu Mon Jul 10 15:37:10 2006 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 10 Jul 2006 15:37:10 -0700 Subject: Problem evalign SNF 2006-07-10 15:37:08: Left bottom objective won't focus Message-ID: No matter which direction I turn the focus knob, the objective moves slowly up until it reaches ~378 and then just sits there. The right bottom objective is able to focus through the entire range (my features come into focus around z value of 610). I was running the anodic recipe. From vilanova at snf.stanford.edu Tue Jul 11 09:57:14 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 11 Jul 2006 09:57:14 -0700 Subject: Problem evalign SNF 2006-07-10 15:37:08: Left bottom objective won't focus Message-ID: exercise focus left objective, adjusted left microscope, Focus got a little better , we'll wait for user to come back and see if she still has the same problem , ok to use. From changyol at snf.stanford.edu Tue Jul 11 11:56:48 2006 From: changyol at snf.stanford.edu (changyol at snf.stanford.edu) Date: Tue, 11 Jul 2006 11:56:48 -0700 Subject: Shutdown evalign SNF 2006-07-11 11:56:47: l/bottom lens does not focus. Message-ID: From changyol at snf.stanford.edu Tue Jul 11 15:01:42 2006 From: changyol at snf.stanford.edu (changyol at snf.stanford.edu) Date: Tue, 11 Jul 2006 15:01:42 -0700 Subject: Shutdown evalign SNF 2006-07-11 11:56:47: l/bottom lens does not focus. Message-ID: manually homed l/bottom optic and exercised focus then checked with mask/wafer to focusing both field. come out good. From vilanova at snf.stanford.edu Wed Jul 12 09:37:35 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 12 Jul 2006 09:37:35 -0700 Subject: Shutdown evalign SNF 2006-07-12 09:37:34: MOnthly Lamp Change In progress.... Message-ID: From vilanova at snf.stanford.edu Wed Jul 12 10:49:34 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 12 Jul 2006 10:49:34 -0700 Subject: Shutdown evalign SNF 2006-07-12 09:37:34: MOnthly Lamp Change In progress.... Message-ID: monthly PM completed. ok to use. From clu at snf.stanford.edu Thu Jul 20 12:24:05 2006 From: clu at snf.stanford.edu (clu at snf.stanford.edu) Date: Thu, 20 Jul 2006 12:24:05 -0700 Subject: Comment evalign SNF 2006-07-20 12:24:04: mouse not working Message-ID: From vilanova at snf.stanford.edu Thu Jul 20 13:16:43 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 20 Jul 2006 13:16:43 -0700 Subject: Comment evalign SNF 2006-07-20 12:24:04: mouse not working Message-ID: Initialized system , mouse working Fine now. From kcrabb at snf.stanford.edu Tue Jul 25 21:27:48 2006 From: kcrabb at snf.stanford.edu (kcrabb at snf.stanford.edu) Date: Tue, 25 Jul 2006 21:27:48 -0700 Subject: Problem evalign SNF 2006-07-25 21:27:47: Vacuum Sensor Error Message-ID: Hi, When trying to do a simple topside pattern in continuous, transparent, hard contact mode, after loading the mask, and adjusting it, when I hit 'continue' an error message saying 'vacuum sensor error--retry?' appears. When I say yes, the message just reappears. This happened 3 consecutive trys of unloading and reloading the mask. I have no idea why this happened, but I am now unable to pattern my resist. From kcrabb at snf.stanford.edu Tue Jul 25 21:38:53 2006 From: kcrabb at snf.stanford.edu (kcrabb at snf.stanford.edu) Date: Tue, 25 Jul 2006 21:38:53 -0700 Subject: Problem evalign SNF 2006-07-25 21:38:52: SYSTEM FROZEN Message-ID: After reporting the previous ' vacuum sensor error' problem, I selected 'no, do not retry' and the system said 'please wait...' and it has made me wait here all night. I have tried to be patient, but it just keeps saying, 'please wait...' It really asked so politely I felt obligated to wait here all night, but alas, I am giving up and going home. My mask is still loaded in the machine. I left my mask holder nearby, in case someone knows how to fix it, and can take my mask out. Please leave my mask nearby, and I will come to get it tomorrow sometime. Thanks. Kevin From kcrabb at snf.stanford.edu Tue Jul 25 21:47:40 2006 From: kcrabb at snf.stanford.edu (kcrabb at snf.stanford.edu) Date: Tue, 25 Jul 2006 21:47:40 -0700 Subject: Problem evalign SNF 2006-07-25 21:47:39: System Frozen II Message-ID: The system was frozen because I accidentally disabled the evaligner, instead of the svgcoat instrument. I re-enabled it, when I realized what was wrong, but now the system says it is locked. My apologies. From vilanova at snf.stanford.edu Wed Jul 26 07:24:50 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 26 Jul 2006 07:24:50 -0700 Subject: Problem evalign SNF 2006-07-25 21:27:47: Vacuum Sensor Error Message-ID: operator error, user disable system by mistake, initialized system, tested and ready to use. From vilanova at snf.stanford.edu Wed Jul 26 07:25:08 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 26 Jul 2006 07:25:08 -0700 Subject: Problem evalign SNF 2006-07-25 21:38:52: SYSTEM FROZEN Message-ID: Operator error read previous message. From vilanova at snf.stanford.edu Wed Jul 26 07:25:21 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 26 Jul 2006 07:25:21 -0700 Subject: Problem evalign SNF 2006-07-25 21:47:39: System Frozen II Message-ID: Initialized system , Good to use. From mahnaz at snf.stanford.edu Thu Jul 27 11:18:46 2006 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 27 Jul 2006 11:18:46 -0700 Subject: Problem evalign SNF 2006-07-27 11:18:46: during training when testing , I am able to go to Message-ID: contact but not able to seperate again. I think that the red bellows need cleaning as well. From changyol at snf.stanford.edu Thu Jul 27 14:38:07 2006 From: changyol at snf.stanford.edu (changyol at snf.stanford.edu) Date: Thu, 27 Jul 2006 14:38:07 -0700 Subject: Problem evalign SNF 2006-07-27 11:18:46: during training when testing , I am able to go to Message-ID: cleaned 4 suction cups and hard reset the machine. tested ok. From closega at snf.stanford.edu Thu Jul 27 18:13:08 2006 From: closega at snf.stanford.edu (closega at snf.stanford.edu) Date: Thu, 27 Jul 2006 18:13:08 -0700 Subject: Problem evalign SNF 2006-07-27 18:13:08: Found machine in "locked state" Message-ID: I found the machine in locked state with the tray out. The screen reads "Machine is locked, end of process. " The computer does not respond. From vilanova at snf.stanford.edu Fri Jul 28 07:36:58 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 28 Jul 2006 07:36:58 -0700 Subject: Problem evalign SNF 2006-07-27 18:13:08: Found machine in "locked state" Message-ID: initialized system , Good to use. From mahnaz at snf.stanford.edu Fri Jul 28 10:09:00 2006 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 28 Jul 2006 10:09:00 -0700 Subject: Comment evalign SNF 2006-07-28 10:08:59: Ihave been told that the system Message-ID: did not seperate and kept in contact mode all the time last night. I just checked and it seems ok , I ran 3 wafers.