Problem evalign SNF 2006-06-03 12:14:07: Hardware problem

dwlee at snf.stanford.edu dwlee at snf.stanford.edu
Sat Jun 3 12:14:07 PDT 2006


When I tried to expose after the alignment, the top part of the EV aligner did not slide to the front. And it did the exposure for 5-10 minutes (the exposure time was set to be 1.9 sec.). The light turned off automatically without any specific action taken. And I can't get my substrate out of the EV aligner.




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