Comment evalign SNF 2006-05-25 23:39:04: Shutter - more info

ericp at snf.stanford.edu ericp at snf.stanford.edu
Thu May 25 23:39:05 PDT 2006


Mehenti and I were looking at the problem today:
It seems that after the machine sits, and then is 
used, the first wafer exposes ~ ok.  The second 
wafer, maybe a little long on exposure, but 
after a few wafers, it's sticking so bad that the lamp housing 
is retracting with the shutter still open, spraying 
UV all over the place.  




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