From vilanova at snf.stanford.edu  Mon Apr  2 07:32:18 2007
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Mon, 2 Apr 2007 07:32:18 -0700
Subject: Problem evalign SNF 2007-03-31 15:47:02: Exposure Problem
Message-ID: <mailman.723.1357938357.25704.evalign-pcs@snf.stanford.edu>

Exposed wafers using  and duplicating the same program
Gibby Use Coating and exposure time ) I just finished 
developing my wafer , everything looks good , no exposure
 problem found.
Ready to use. 



From mahnaz at snf.stanford.edu  Wed Apr 25 11:39:18 2007
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Wed, 25 Apr 2007 11:39:18 -0700
Subject: Problem evalign SNF 2007-04-25 11:39:17: i looked at user wafers
Message-ID: <mailman.724.1357938357.25704.evalign-pcs@snf.stanford.edu>

with gold on, 1 um resist, he used 1.9 second to clear
around edge still problem.



From kevhuang at snf.stanford.edu  Wed Apr 25 13:20:03 2007
From: kevhuang at snf.stanford.edu (kevhuang at snf.stanford.edu)
Date: Wed, 25 Apr 2007 13:20:03 -0700
Subject: Problem evalign SNF 2007-04-25 13:20:03: edge problem
Message-ID: <mailman.725.1357938357.25704.evalign-pcs@snf.stanford.edu>

1.6 um resist needs 2.2 seconds to clear the edges



From vilanova at snf.stanford.edu  Thu Apr 26 09:22:35 2007
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 26 Apr 2007 09:22:35 -0700
Subject: Comment evalign SNF 2007-03-02 10:49:24: Monthly Lamp completed
Message-ID: <mailman.726.1357938357.25704.evalign-pcs@snf.stanford.edu>

Commenr cleared. 



From vilanova at snf.stanford.edu  Thu Apr 26 09:24:35 2007
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 26 Apr 2007 09:24:35 -0700
Subject: Problem evalign SNF 2007-04-25 11:39:17: i looked at user wafers
Message-ID: <mailman.727.1357938357.25704.evalign-pcs@snf.stanford.edu>

Replaced lamp , calibrated , cleaned ellipsoidal mirror,
exposed  a couple of wafers ( 1.6 microns resist  Use 1.8 sec 
Exposure)



From vilanova at snf.stanford.edu  Thu Apr 26 09:24:49 2007
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Thu, 26 Apr 2007 09:24:49 -0700
Subject: Problem evalign SNF 2007-04-25 13:20:03: edge problem
Message-ID: <mailman.728.1357938357.25704.evalign-pcs@snf.stanford.edu>

Please read previous message. 



From huangzb at snf.stanford.edu  Sat Apr 28 01:00:41 2007
From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu)
Date: Sat, 28 Apr 2007 01:00:41 -0700
Subject: Problem evalign SNF 2007-04-28 01:00:41: takes 2.1s hard contact to expose 1.7um resist
Message-ID: <mailman.729.1357938357.25704.evalign-pcs@snf.stanford.edu>




From mahnaz at snf.stanford.edu  Mon Apr 30 11:07:13 2007
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Mon, 30 Apr 2007 11:07:13 -0700
Subject: Problem evalign SNF 2007-04-28 01:00:41: takes 2.1s hard contact to expose 1.7um resist
Message-ID: <mailman.730.1357938357.25704.evalign-pcs@snf.stanford.edu>

Yes, I am aware of the issue.
It seems that the Ellipsoid mirror needs to be replaced.
Please check the binder on the SVG table the new exposure are noted in there.