Problem evalign SNF 2007-04-25 11:39:17: i looked at user wafers

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Apr 26 09:24:35 PDT 2007


Replaced lamp , calibrated , cleaned ellipsoidal mirror,
exposed  a couple of wafers ( 1.6 microns resist  Use 1.8 sec 
Exposure)




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