Problem evalign SNF 2007-04-28 01:00:41: takes 2.1s hard contact to expose 1.7um resist
mahnaz at snf.stanford.edu
mahnaz at snf.stanford.edu
Mon Apr 30 11:07:13 PDT 2007
Yes, I am aware of the issue.
It seems that the Ellipsoid mirror needs to be replaced.
Please check the binder on the SVG table the new exposure are noted in there.
More information about the evalign-pcs
mailing list