From vilanova at snf.stanford.edu Wed Aug 1 07:28:58 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 1 Aug 2007 07:28:58 -0700 Subject: Problem evalign SNF 2007-07-31 12:46:43: right bottom objective too low Message-ID: Right bottom RIng Was missing , I put another one in ready to use. From tomada at snf.stanford.edu Wed Aug 8 16:04:40 2007 From: tomada at snf.stanford.edu (tomada at snf.stanford.edu) Date: Wed, 8 Aug 2007 16:04:40 -0700 Subject: Problem evalign SNF 2007-08-08 16:04:40: exposure very long and poor uniformity from center to the edge of the wafer Message-ID: From vilanova at snf.stanford.edu Thu Aug 9 07:34:49 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 9 Aug 2007 07:34:49 -0700 Subject: Shutdown evalign SNF 2007-08-09 07:34:49: Broken Cold Mirror Message-ID: When I came In this morning I turned Off the lamp to le it Cool Down to do the monthly change lamp , When I open the Lamp House I found the COld mirror Broken!!!!! the Old lamp is fine no evidence of Lamp Explosion . I,m Shutting it down until we order and get a new Cold mirror, Sorry for the Inconvinience. From mahnaz at snf.stanford.edu Mon Aug 13 09:53:12 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 13 Aug 2007 09:53:12 -0700 Subject: Comment evalign SNF 2007-08-13 09:53:12: I checked tracking # Message-ID: and the part is already here from Austria. We should receive it today or the most tomorrow. From mahnaz at snf.stanford.edu Mon Aug 13 13:41:14 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 13 Aug 2007 13:41:14 -0700 Subject: Comment evalign SNF 2007-08-13 13:41:14: The mirror I got is the wrong size. Message-ID: I am working with EVG. From mahnaz at snf.stanford.edu Tue Aug 14 08:58:23 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 14 Aug 2007 08:58:23 -0700 Subject: Comment evalign SNF 2007-08-14 08:58:22: mirror dimension has been a big issue Message-ID: So far Evg and I came across 3 different dimensions, surprisingly stupid but they are working with me. For the record our 45 degree Dielectric mirror measures w=13 cm L=17.5 cm. I am working on it and thank god that I have a blanket p.O. From vilanova at snf.stanford.edu Tue Aug 21 15:40:11 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 21 Aug 2007 15:40:11 -0700 Subject: Problem evalign SNF 2007-08-08 16:04:40: exposure very long and poor uniformity from center to the edge of the wafer Message-ID: Replaced both mirrors , replaced lamp and calibrated intensity 15mw/cm2 Intensity 2.65% From vilanova at snf.stanford.edu Tue Aug 21 15:40:23 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 21 Aug 2007 15:40:23 -0700 Subject: Comment evalign SNF 2007-08-13 09:53:12: I checked tracking # Message-ID: Replaced both mirrors , replaced lamp and calibrated intensity 15mw/cm2 Intensity 2.65% From vilanova at snf.stanford.edu Tue Aug 21 15:42:00 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 21 Aug 2007 15:42:00 -0700 Subject: Comment evalign SNF 2007-08-13 13:41:14: The mirror I got is the wrong size. Message-ID: replaced both mirrors ( replaced broken mirror ) replaced lamp and calibrated intensity 15mw?cm2 uniformity 2.65% From vilanova at snf.stanford.edu Tue Aug 21 15:42:11 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 21 Aug 2007 15:42:11 -0700 Subject: Comment evalign SNF 2007-08-14 08:58:22: mirror dimension has been a big issue Message-ID: eplaced both mirrors ( replaced broken mirror ) replaced lamp and calibrated intensity 15mw?cm2 uniformity 2.65% From vilanova at snf.stanford.edu Tue Aug 21 15:42:21 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 21 Aug 2007 15:42:21 -0700 Subject: Shutdown evalign SNF 2007-08-09 07:34:49: Broken Cold Mirror Message-ID: eplaced both mirrors ( replaced broken mirror ) replaced lamp and calibrated intensity 15mw?cm2 uniformity 2.65% From mahnaz at snf.stanford.edu Tue Aug 21 16:32:24 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 21 Aug 2007 16:32:24 -0700 Subject: Comment evalign SNF 2007-08-21 16:32:24: Ran 1 um 3612 in hard contact 1 second Message-ID: exp. 1/1.5 um resolved across the wafers. looks beautiful. From erichall at snf.stanford.edu Fri Aug 24 13:07:09 2007 From: erichall at snf.stanford.edu (erichall at snf.stanford.edu) Date: Fri, 24 Aug 2007 13:07:09 -0700 Subject: Problem evalign SNF 2007-08-24 13:07:08: Initialization Problem Message-ID: After logging into evalign, the instrument began to initialize. However, it seems to have gotten stuck in this part and doesn't respond. From vilanova at snf.stanford.edu Fri Aug 24 13:56:01 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 24 Aug 2007 13:56:01 -0700 Subject: Problem evalign SNF 2007-08-24 13:07:08: Initialization Problem Message-ID: I just re initialized the system software, tested a couple of times, ok to use.