Problem evalign SNF 2007-08-08 16:04:40: exposure very long and poor uniformity from center to the edge of the wafer

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Aug 21 15:40:11 PDT 2007


Replaced both mirrors , replaced lamp and calibrated
intensity 15mw/cm2
Intensity 2.65%




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