From emyers at snf.stanford.edu Sat Dec 8 05:09:31 2007 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sat, 8 Dec 2007 05:09:31 -0800 Subject: Problem evalign SNF 2007-12-08 05:09:30: power outage Message-ID: restarted tool but not tested From vilanova at snf.stanford.edu Mon Dec 10 07:20:38 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 10 Dec 2007 07:20:38 -0800 Subject: Problem evalign SNF 2007-12-08 05:09:30: power outage Message-ID: lamp calibration completed. From lindaw at snf.stanford.edu Sun Dec 16 12:31:01 2007 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sun, 16 Dec 2007 12:31:01 -0800 Subject: Problem evalign SNF 2007-12-16 12:31:00: anodic bond mode wec problem Message-ID: when using the anodic program for alignment before bonding, the left side has a much larger gap between my wafers than the right side. When in contact, I can focus fairly well on both wafer alignment marks on the right side, but the left side align marks will not focus together. If I use the crosshairs only to align the left side, then when I physically clamp my wafers together, there is a huge shift in alignment on the left side. BLAR!!! From vilanova at snf.stanford.edu Mon Dec 17 07:39:37 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 17 Dec 2007 07:39:37 -0800 Subject: Comment evalign SNF 2007-12-17 07:39:36: ANodic Bonding chuck Message-ID: One of the Chucks Needs Adjustement, We;ll try to fix it today or during the shutdown , users can try the other chuck for now. From vilanova at snf.stanford.edu Wed Dec 19 07:20:00 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 19 Dec 2007 07:20:00 -0800 Subject: Shutdown evalign SNF 2007-12-19 07:20:00: holiday shutdown Message-ID: