From kcrabb at snf.stanford.edu Fri Feb 2 16:32:58 2007 From: kcrabb at snf.stanford.edu (kcrabb at snf.stanford.edu) Date: Fri, 2 Feb 2007 16:32:58 -0800 Subject: Problem evalign SNF 2007-02-02 16:32:57: Bulb Burnt Out Message-ID: Hello All, The EVAligner does not seem to be working. After checking a few things, I realized the exposure light does come on when it should be exposing the sample. Thus, I believe the exposure bulb is burnt out. Either that, or the shutter is not opening, but I believe I hear the sound of shutter opening and closing when it should. I encountered this problem when using the backside program in continuous, crosshair, hard contact mode, with an exposure of 1.7 and 1.8 seconds. I tried multiple runs, and the light never came on. From vilanova at snf.stanford.edu Mon Feb 5 07:17:07 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 5 Feb 2007 07:17:07 -0800 Subject: Problem evalign SNF 2007-02-02 16:32:57: Bulb Burnt Out Message-ID: Operator error, lamp is on and working fine, exposed a couple of wafers, ready to use. From vilanova at snf.stanford.edu Thu Feb 8 14:19:55 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 8 Feb 2007 14:19:55 -0800 Subject: Shutdown evalign SNF 2007-02-08 14:19:55: MOnthly Lamp change in progress...... Message-ID: From vilanova at snf.stanford.edu Thu Feb 8 14:48:21 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 8 Feb 2007 14:48:21 -0800 Subject: Shutdown evalign SNF 2007-02-08 14:19:55: MOnthly Lamp change in progress...... Message-ID: Monthly Lamp change completed. Lamp calibrated Intensity 15Mw/Cm2 Uniformity = 1.72% ok to use. From gibby at snf.stanford.edu Tue Feb 20 13:09:37 2007 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Tue, 20 Feb 2007 13:09:37 -0800 Subject: Comment evalign SNF 2007-02-20 13:09:36: Alignment Shift on Hard Contact Message-ID: It looks like the alignment is shifting when the mask makes hard contact. The shift seems to be consistant--a vertical shift of about 2-4 microns. From peichen at snf.stanford.edu Wed Feb 28 21:55:45 2007 From: peichen at snf.stanford.edu (peichen at snf.stanford.edu) Date: Wed, 28 Feb 2007 21:55:45 -0800 Subject: Problem evalign SNF 2007-02-28 21:55:44: Machined locked Message-ID: