Comment evalign SNF 2007-02-20 13:09:36: Alignment Shift on Hard Contact

gibby at snf.stanford.edu gibby at snf.stanford.edu
Tue Feb 20 13:09:37 PST 2007


It looks like the alignment is shifting when the mask makes hard contact.  The shift seems to be consistant--a vertical shift of about 2-4 microns.




More information about the evalign-pcs mailing list