From rmelamud at snf.stanford.edu Mon Jul 2 18:24:59 2007 From: rmelamud at snf.stanford.edu (rmelamud at snf.stanford.edu) Date: Mon, 2 Jul 2007 18:24:59 -0700 Subject: Problem evalign SNF 2007-07-02 18:24:58: machine locked Message-ID: I accidentally disabled the machine before exiting, and now the machine is locked. Don't know how to unlock it. Sorry... From vilanova at snf.stanford.edu Tue Jul 3 06:55:06 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 3 Jul 2007 06:55:06 -0700 Subject: Problem evalign SNF 2007-07-02 18:24:58: machine locked Message-ID: MAchine Locked ,User disabled machine before parking the Chuck, Initialized system tested a couple of times, System back to normal & ready to use. From jparker at snf.stanford.edu Tue Jul 3 15:27:38 2007 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Tue, 3 Jul 2007 15:27:38 -0700 Subject: Problem evalign SNF 2007-07-03 15:27:38: Exposure times drifting ihgher Message-ID: 3612 1 um resist now needs 1.2s or greater exposure to clear (hard contact). 3612 1.6 um resist now needs 1.7s or greater exposure to clear (hard contact). Respective values were 1.0s and 1.5s immediately after a new lamp was last installed. From gsosa at snf.stanford.edu Fri Jul 6 14:57:57 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 6 Jul 2007 14:57:57 -0700 Subject: Problem evalign SNF 2007-07-03 15:27:38: Exposure times drifting ihgher Message-ID: Checked intensity. Only 10.4 mw. Unable to adjust higher. Replaced the UV lamp and adjusted for 10.0 mw/cm2. Uniformity at 1.0 %. System ready to use. From erichall at snf.stanford.edu Mon Jul 9 20:05:21 2007 From: erichall at snf.stanford.edu (erichall at snf.stanford.edu) Date: Mon, 9 Jul 2007 20:05:21 -0700 Subject: Problem evalign SNF 2007-07-09 20:05:20: Vacuum Sensor Problem Message-ID: After adjusting the mask, the instrument gives a Vacuum Sensor Error alert. Hitting 'retry' gives the error again, hitting 'no' causes the process to abort. From vilanova at snf.stanford.edu Tue Jul 10 07:37:51 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 10 Jul 2007 07:37:51 -0700 Subject: Problem evalign SNF 2007-07-09 20:05:20: Vacuum Sensor Problem Message-ID: The Oring came off of the mAsk plate holder, I put it back checked & tested machine a few times, ok to use. From erichall at snf.stanford.edu Fri Jul 27 09:31:50 2007 From: erichall at snf.stanford.edu (erichall at snf.stanford.edu) Date: Fri, 27 Jul 2007 09:31:50 -0700 Subject: Problem evalign SNF 2007-07-27 09:31:50: EVAlign Vacuum Sensor Error Message-ID: The EVAlign instrument continually reports a vacuum sensor error immediately after mask alignment. Repeated attempts haven't solved problem. From vilanova at snf.stanford.edu Fri Jul 27 10:40:46 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 27 Jul 2007 10:40:46 -0700 Subject: Problem evalign SNF 2007-07-27 09:31:50: EVAlign Vacuum Sensor Error Message-ID: mask wasnt properly aligned, Aligned mask , no more Vacuum error, ok to use. From vipin at snf.stanford.edu Mon Jul 30 10:22:55 2007 From: vipin at snf.stanford.edu (vipin at snf.stanford.edu) Date: Mon, 30 Jul 2007 10:22:55 -0700 Subject: Problem evalign SNF 2007-07-30 10:22:54: problem with IR and vacuum Message-ID: The IR does not seem to be working (lights don't turn on) and system gave a vacuum error and couldn't hold the mask. From vilanova at snf.stanford.edu Mon Jul 30 11:21:44 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 30 Jul 2007 11:21:44 -0700 Subject: Problem evalign SNF 2007-07-30 10:22:54: problem with IR and vacuum Message-ID: vacuum o- ring found loose , Inserted o ring correctly, I also checkd the IR power supply found one of the connection loose, ok to use. From lindaw at snf.stanford.edu Tue Jul 31 12:46:44 2007 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 31 Jul 2007 12:46:44 -0700 Subject: Problem evalign SNF 2007-07-31 12:46:43: right bottom objective too low Message-ID: I cannot focus on my wafer. objective stops before fully focused. Is a shim perhaps missing?