Problem evalign SNF 2007-07-03 15:27:38: Exposure times drifting ihgher

jparker at snf.stanford.edu jparker at snf.stanford.edu
Tue Jul 3 15:27:38 PDT 2007


3612 1 um resist now needs 1.2s or greater exposure to clear (hard contact).
3612 1.6 um resist now needs 1.7s or greater exposure to clear (hard contact).
Respective values were 1.0s and 1.5s immediately after a new lamp was last installed.




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