From dmckean at snf.stanford.edu Fri Jun 1 14:17:47 2007 From: dmckean at snf.stanford.edu (dmckean at snf.stanford.edu) Date: Fri, 1 Jun 2007 14:17:47 -0700 Subject: Problem evalign SNF 2007-06-01 14:17:46: evalign locked Message-ID: aligner stuck in undefined config. From vilanova at snf.stanford.edu Fri Jun 1 14:29:23 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 1 Jun 2007 14:29:23 -0700 Subject: Problem evalign SNF 2007-06-01 14:17:46: evalign locked Message-ID: EV Align Unlocked User disable before he/she parked the mask loader , system checked , tested , Ok to use. From kuanlinc at snf.stanford.edu Sun Jun 10 17:03:47 2007 From: kuanlinc at snf.stanford.edu (kuanlinc at snf.stanford.edu) Date: Sun, 10 Jun 2007 17:03:47 -0700 Subject: Comment evalign SNF 2007-06-10 17:03:45: Light intensity not uniform Message-ID: 1.5um feature looks good at the center and under expose at the perimeter. From mtang at snf.stanford.edu Tue Jun 12 09:33:43 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 12 Jun 2007 09:33:43 -0700 Subject: Problem evalign SNF 2007-06-12 09:33:42: Left turret loose Message-ID: Maintenace will investigate at first opportunity. From vilanova at snf.stanford.edu Wed Jun 13 07:42:55 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 13 Jun 2007 07:42:55 -0700 Subject: Shutdown evalign SNF 2007-06-13 07:42:55: MOnthly lam change, Maintenance In progress.... Message-ID: From vilanova at snf.stanford.edu Wed Jun 13 10:31:35 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 13 Jun 2007 10:31:35 -0700 Subject: Comment evalign SNF 2007-05-22 15:22:33: intensity is at 10 mw Message-ID: Replaced defevtive ellipsoidal mirror, changed lamp, calibrated lamp Intensity 15Mw/Cm2 Uniformity = 1.99% Adjusted Left Turret. Ok to use From vilanova at snf.stanford.edu Wed Jun 13 10:32:19 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 13 Jun 2007 10:32:19 -0700 Subject: Comment evalign SNF 2007-06-10 17:03:45: Light intensity not uniform Message-ID: Replaced Defective Ellipsoidal MIrror, changed lamp calibrated lamp , adjusted left Turret, ok to use. From vilanova at snf.stanford.edu Wed Jun 13 10:32:43 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 13 Jun 2007 10:32:43 -0700 Subject: Problem evalign SNF 2007-06-12 09:33:42: Left turret loose Message-ID: Adjusted left Turret, Ready to use. From vilanova at snf.stanford.edu Wed Jun 13 10:33:31 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 13 Jun 2007 10:33:31 -0700 Subject: Shutdown evalign SNF 2007-06-13 07:42:55: MOnthly lam change, Maintenance In progress.... Message-ID: MOnthly lamp change and calibration completed Intensity 15Mw/Cm2 ( new Ellipsoidal MIrror) Uniformity 1.99% Ready to use. From dmckean at snf.stanford.edu Tue Jun 19 17:10:52 2007 From: dmckean at snf.stanford.edu (dmckean at snf.stanford.edu) Date: Tue, 19 Jun 2007 17:10:52 -0700 Subject: Problem evalign SNF 2007-06-19 17:10:51: evalign Message-ID: tool is locked From vilanova at snf.stanford.edu Wed Jun 20 08:00:31 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 20 Jun 2007 08:00:31 -0700 Subject: Problem evalign SNF 2007-06-19 17:10:51: evalign Message-ID: From vilanova at snf.stanford.edu Wed Jun 20 08:01:02 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 20 Jun 2007 08:01:02 -0700 Subject: Comment evalign SNF 2007-06-20 08:01:01: Locked PC Message-ID: From vilanova at snf.stanford.edu Wed Jun 20 08:01:54 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 20 Jun 2007 08:01:54 -0700 Subject: Comment evalign SNF 2007-06-20 08:01:01: Locked PC Message-ID: Unlocked PC, initialized system , ok to use. From mtang at snf.stanford.edu Wed Jun 20 09:39:10 2007 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 20 Jun 2007 09:39:10 -0700 Subject: Problem evalign SNF 2007-06-20 09:39:10: System lockup has been observed Message-ID: If system locks up, notify maintenance or Mahnaz. If you are trained to reset, make sure to notify maintenance and Mahnaz so they can follow this problem. From vilanova at snf.stanford.edu Mon Jun 25 09:33:40 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 25 Jun 2007 09:33:40 -0700 Subject: Problem evalign SNF 2007-06-20 09:39:10: System lockup has been observed Message-ID: Havent seen any Lock up problems for the last 4 days , Sometimes the system Lock Up if the User dont park the Mask holder and disable the system before finish that. Ok to use.