From vilanova at snf.stanford.edu Thu Mar 1 07:27:27 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 1 Mar 2007 07:27:27 -0800 Subject: Problem evalign SNF 2007-02-28 21:55:44: Machined locked Message-ID: User probable disabled the machine before the final step, initialized the system , ok to use. From vilanova at snf.stanford.edu Fri Mar 2 10:49:24 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 2 Mar 2007 10:49:24 -0800 Subject: Comment evalign SNF 2007-03-02 10:49:24: Monthly Lamp completed Message-ID: Monthly Lamp Completed and calibrated. From gibby at snf.stanford.edu Fri Mar 2 14:53:28 2007 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Fri, 2 Mar 2007 14:53:28 -0800 Subject: Problem evalign SNF 2007-03-02 14:53:27: Chuck Vacuum Not Working Message-ID: Wafers are sticking to the mask due to lack of chuck vacuum. From vilanova at snf.stanford.edu Fri Mar 2 15:10:39 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 2 Mar 2007 15:10:39 -0800 Subject: Problem evalign SNF 2007-03-02 14:53:27: Chuck Vacuum Not Working Message-ID: CHuck vacuum Was out of Nozzle, I put it back and tested ok. From mahnaz at snf.stanford.edu Fri Mar 2 17:13:27 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 2 Mar 2007 17:13:27 -0800 Subject: Comment evalign SNF 2007-03-02 17:13:26: system was jammed by a user. Message-ID: Reset and tried working fine. From gyama at snf.stanford.edu Sat Mar 3 10:09:12 2007 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Sat, 3 Mar 2007 10:09:12 -0800 Subject: Problem evalign SNF 2007-03-03 10:09:11: vacuum hose to bottom wafer chuck not Message-ID: connected. Wafer not being held during alignment. Wafers sticking to mask too. From vilanova at snf.stanford.edu Mon Mar 5 07:08:55 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 5 Mar 2007 07:08:55 -0800 Subject: Problem evalign SNF 2007-03-03 10:09:11: vacuum hose to bottom wafer chuck not Message-ID: replaced defective vacuum hose, tested and exposed wafer ok to use. From mahnaz at snf.stanford.edu Mon Mar 5 09:15:29 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 5 Mar 2007 09:15:29 -0800 Subject: Comment evalign SNF 2007-02-20 13:09:36: Alignment Shift on Hard Contact Message-ID: From joongsun at snf.stanford.edu Tue Mar 6 23:28:43 2007 From: joongsun at snf.stanford.edu (joongsun at snf.stanford.edu) Date: Tue, 6 Mar 2007 23:28:43 -0800 Subject: Problem evalign SNF 2007-03-06 23:28:42: Pointer doesn't move Message-ID: From vilanova at snf.stanford.edu Wed Mar 7 07:18:06 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 7 Mar 2007 07:18:06 -0800 Subject: Problem evalign SNF 2007-03-06 23:28:42: Pointer doesn't move Message-ID: computer was locked up, re- started computer, ok to use. From closega at snf.stanford.edu Wed Mar 7 20:05:36 2007 From: closega at snf.stanford.edu (closega at snf.stanford.edu) Date: Wed, 7 Mar 2007 20:05:36 -0800 Subject: Problem evalign SNF 2007-03-07 20:05:36: Machine is locked w/ my mask still loaded Message-ID: It is my fault: I disabled the tool by mistake before unloading my mask. Sorry. From vilanova at snf.stanford.edu Thu Mar 8 07:28:50 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 8 Mar 2007 07:28:50 -0800 Subject: Comment evalign SNF 2007-03-02 17:13:26: system was jammed by a user. Message-ID: comment cleared. From vilanova at snf.stanford.edu Thu Mar 8 07:29:17 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 8 Mar 2007 07:29:17 -0800 Subject: Problem evalign SNF 2007-03-07 20:05:36: Machine is locked w/ my mask still loaded Message-ID: unload user mask , initialized computer, ok to use. From grahamab at snf.stanford.edu Thu Mar 8 12:08:41 2007 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Thu, 8 Mar 2007 12:08:41 -0800 Subject: Problem evalign SNF 2007-03-08 12:08:41: no UV Message-ID: no UV light during "exposure" From gyama at snf.stanford.edu Thu Mar 8 12:41:36 2007 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Thu, 8 Mar 2007 12:41:36 -0800 Subject: Shutdown evalign SNF 2007-03-08 12:41:35: no UV lamp Message-ID: From vilanova at snf.stanford.edu Thu Mar 8 13:32:03 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 8 Mar 2007 13:32:03 -0800 Subject: Problem evalign SNF 2007-03-08 12:08:41: no UV Message-ID: lamp back on , re checked calibration , ok to use. From vilanova at snf.stanford.edu Thu Mar 8 13:32:23 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 8 Mar 2007 13:32:23 -0800 Subject: Shutdown evalign SNF 2007-03-08 12:41:35: no UV lamp Message-ID: UV lamp back On , re checked calibration , ok to use. From sjo at snf.stanford.edu Mon Mar 19 01:10:49 2007 From: sjo at snf.stanford.edu (sjo at snf.stanford.edu) Date: Mon, 19 Mar 2007 01:10:49 -0700 Subject: Problem evalign SNF 2007-03-19 01:10:48: Lamp fading... ? Message-ID: Is the UV lamp fading? I got a lot of underexposed wafers: - Reflective substrate (Al) - 1.6 micron 3612 + 120 sec bake (SVGCoat 2) - Expose 2.3 seconds (continuous) - 120 sec post-exposure bake (at 110C on SVGDev 1) - Develop 2x 65 seconds (SVGDev 1) - Barely developed o.k., sometimes not enough Usually, 1.6 seconds should be enough to expose and develop this well. I think either the lamp is weak, or the developer is poor. I also ran a plain Si wafer as a control, it also developed just barely far enough. From bongsang at snf.stanford.edu Wed Mar 21 22:43:35 2007 From: bongsang at snf.stanford.edu (bongsang at snf.stanford.edu) Date: Wed, 21 Mar 2007 22:43:35 -0700 Subject: Problem evalign SNF 2007-03-21 22:43:35: focus problem Message-ID: focus is not uniform across the wafer.... From vilanova at snf.stanford.edu Mon Mar 26 08:26:26 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 26 Mar 2007 08:26:26 -0700 Subject: Problem evalign SNF 2007-03-19 01:10:48: Lamp fading... ? Message-ID: Replaced lamp & calibrated , also I checked the Focus Issue and I Dont see nothing wrong with it. ok to use. From vilanova at snf.stanford.edu Mon Mar 26 08:26:41 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 26 Mar 2007 08:26:41 -0700 Subject: Problem evalign SNF 2007-03-21 22:43:35: focus problem Message-ID: Please read previous message. From gyama at snf.stanford.edu Mon Mar 26 11:16:59 2007 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Mon, 26 Mar 2007 11:16:59 -0700 Subject: Problem evalign SNF 2007-03-26 11:16:58: exposed 1.6um @ 4.0 sec, no pattern Message-ID: after dev, UV lamp looks dim, pls check intensity From vilanova at snf.stanford.edu Mon Mar 26 11:45:08 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 26 Mar 2007 11:45:08 -0700 Subject: Problem evalign SNF 2007-03-26 11:16:58: exposed 1.6um @ 4.0 sec, no pattern Message-ID: Intensity Checked and also uniformity , I've Increased the Ilumination reference buttons. From pbrink at snf.stanford.edu Thu Mar 29 09:18:27 2007 From: pbrink at snf.stanford.edu (pbrink at snf.stanford.edu) Date: Thu, 29 Mar 2007 09:18:27 -0700 Subject: Problem evalign SNF 2007-03-29 09:18:21: UV lamp off Message-ID: No UV light From vilanova at snf.stanford.edu Thu Mar 29 10:45:01 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 29 Mar 2007 10:45:01 -0700 Subject: Shutdown evalign SNF 2007-03-29 10:44:56: under maintenance.... Message-ID: From vilanova at snf.stanford.edu Thu Mar 29 14:43:45 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 29 Mar 2007 14:43:45 -0700 Subject: Problem evalign SNF 2007-03-29 09:18:21: UV lamp off Message-ID: UV lamp back on , re-calibrated lamp From gsosa at snf.stanford.edu Thu Mar 29 14:46:06 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 29 Mar 2007 14:46:06 -0700 Subject: Shutdown evalign SNF 2007-03-29 10:44:56: under maintenance.... Message-ID: Removed lamp house and repaired X/Y/Z unit. From gibby at snf.stanford.edu Sat Mar 31 15:47:02 2007 From: gibby at snf.stanford.edu (gibby at snf.stanford.edu) Date: Sat, 31 Mar 2007 15:47:02 -0700 Subject: Problem evalign SNF 2007-03-31 15:47:02: Exposure Problem Message-ID: I ran two wafers through the system, 1 um resist, 2.3s exposure time. Neither wafer appeared to be exposed after development.