From vilanova at snf.stanford.edu Mon May 14 08:37:20 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 14 May 2007 08:37:20 -0700 Subject: Comment evalign SNF 2007-05-14 08:37:19: MONTHLY LAMP CHANGE COMPLETED Message-ID: MONTHLY LAMP CHANGE COMPLETED, CLEANED ELLIPSOIDAL MIRROR, COLD MIRROR, CALIBRATED LAMP OK TO USE. From shwong at snf.stanford.edu Mon May 14 09:05:03 2007 From: shwong at snf.stanford.edu (shwong at snf.stanford.edu) Date: Mon, 14 May 2007 09:05:03 -0700 Subject: Problem evalign SNF 2007-05-14 09:05:02: one of the IR Backlights does not work Message-ID: From vilanova at snf.stanford.edu Thu May 17 14:12:36 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 17 May 2007 14:12:36 -0700 Subject: Problem evalign SNF 2007-05-14 09:05:02: one of the IR Backlights does not work Message-ID: Replaced broken Lamp , tested , good to use. From tomada at snf.stanford.edu Thu May 17 16:37:35 2007 From: tomada at snf.stanford.edu (tomada at snf.stanford.edu) Date: Thu, 17 May 2007 16:37:35 -0700 Subject: Comment evalign SNF 2007-05-17 16:37:34: exposure very bad Message-ID: Went from 1.7 to 4 s same result for 1.6 um, and hard contact took away PR from wafer (???) From tomada at snf.stanford.edu Thu May 17 17:03:40 2007 From: tomada at snf.stanford.edu (tomada at snf.stanford.edu) Date: Thu, 17 May 2007 17:03:40 -0700 Subject: Shutdown evalign SNF 2007-05-17 17:03:39: see previous comment Message-ID: From vilanova at snf.stanford.edu Fri May 18 14:59:32 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 18 May 2007 14:59:32 -0700 Subject: Comment evalign SNF 2007-05-17 16:37:34: exposure very bad Message-ID: Cleaned ellipsoidal & Cold mirror, Calibrated lamp, Mahnaz Exposed a few wafers , Uniformity Looks Good. Ok to use. From vilanova at snf.stanford.edu Fri May 18 14:59:59 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 18 May 2007 14:59:59 -0700 Subject: Shutdown evalign SNF 2007-05-17 17:03:39: see previous comment Message-ID: Re calibrated lamp, cleaned mirrors, exposed wafers , Good to use. From mahnaz at snf.stanford.edu Tue May 22 15:22:34 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 22 May 2007 15:22:34 -0700 Subject: Comment evalign SNF 2007-05-22 15:22:33: intensity is at 10 mw Message-ID: need higher exposure for 1 um resist about 1.2 to 1.4 seconds we are looking to replace the mirror. From ski4ever at snf.stanford.edu Wed May 30 01:48:00 2007 From: ski4ever at snf.stanford.edu (ski4ever at snf.stanford.edu) Date: Wed, 30 May 2007 01:48:00 -0700 Subject: Problem evalign SNF 2007-05-30 01:48:00: vaccuum sensor error Message-ID: After loading the mask and orienting it so that it is square, I press continue as I am asked. The microscopes move away, but then an error message comes up that says vaccuum sensor error and I am unable to continue the process. This happened several times on different runs. From vilanova at snf.stanford.edu Wed May 30 08:01:07 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 30 May 2007 08:01:07 -0700 Subject: Problem evalign SNF 2007-05-30 01:48:00: vaccuum sensor error Message-ID: checked system , everything Looks Fine, the reason why user was getting a " vacuum sensor Error" was because he or she Did not align the mask properly. checked & tested ok to use.