Comment evalign SNF 2007-05-17 16:37:34: exposure very bad

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Fri May 18 14:59:32 PDT 2007


Cleaned ellipsoidal & Cold  mirror, Calibrated lamp,
Mahnaz Exposed a few wafers , Uniformity Looks Good.
Ok to use.




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