From vilanova at snf.stanford.edu Fri Oct 12 08:34:37 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 12 Oct 2007 08:34:37 -0700 Subject: Comment evalign SNF 2007-10-12 08:34:37: MOnthly lamp change Message-ID: MOnthly lamp change and calibration . Intensity = 15mW/Cm2 Uniformity = .5 % Cleaned bellows, ready to use. From ndhuang at snf.stanford.edu Fri Oct 12 15:24:54 2007 From: ndhuang at snf.stanford.edu (ndhuang at snf.stanford.edu) Date: Fri, 12 Oct 2007 15:24:54 -0700 Subject: Problem evalign SNF 2007-10-12 15:24:53: backside alignment dosn't work Message-ID: in backside process after microscopy focused to the mask and ready to insert subsrate, the foused patterns will disappear immediately. From vilanova at snf.stanford.edu Mon Oct 15 07:36:39 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 15 Oct 2007 07:36:39 -0700 Subject: Problem evalign SNF 2007-10-12 15:24:53: backside alignment dosn't work Message-ID: Operator error, backside Alignment working Fine, I put our mask a couple of times adjusted microscopes and exposed a wafer . From mahnaz at snf.stanford.edu Tue Oct 16 14:36:44 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 16 Oct 2007 14:36:44 -0700 Subject: Comment evalign SNF 2007-10-16 14:36:43: i ran a 1 um wafer Message-ID: looks ok. I need to spend some time on it later. 1 um need at least 1.2 second of exposure. From vrevol at snf.stanford.edu Sat Oct 27 16:16:08 2007 From: vrevol at snf.stanford.edu (vrevol at snf.stanford.edu) Date: Sat, 27 Oct 2007 16:16:08 -0700 Subject: Problem evalign SNF 2007-10-27 16:16:08: Wafers Fall Message-ID: The 1 inch wafer I was processing stuck to the mask and fell into the machine. I do not know if it can interfere with the use of the aligner. From vilanova at snf.stanford.edu Mon Oct 29 07:46:10 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 29 Oct 2007 07:46:10 -0700 Subject: Problem evalign SNF 2007-10-27 16:16:08: Wafers Fall Message-ID: FOund Sample , removed from Bottom MIcroscope Stage, Tested system , Ready to use. From bahlg at snf.stanford.edu Mon Oct 29 17:28:21 2007 From: bahlg at snf.stanford.edu (bahlg at snf.stanford.edu) Date: Mon, 29 Oct 2007 17:28:21 -0700 Subject: Problem evalign SNF 2007-10-29 17:28:18: Lamp not working Message-ID: 5:30pm Monday From vilanova at snf.stanford.edu Tue Oct 30 07:51:53 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 30 Oct 2007 07:51:53 -0700 Subject: Problem evalign SNF 2007-10-29 17:28:18: Lamp not working Message-ID: lamp back on.