From vilanova at snf.stanford.edu Fri Apr 4 07:35:11 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 4 Apr 2008 07:35:11 -0700 Subject: Shutdown evalign SNF 2008-04-04 07:35:10: Monthly lamp change in progress.... Message-ID: From vilanova at snf.stanford.edu Fri Apr 4 08:30:44 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 4 Apr 2008 08:30:44 -0700 Subject: Shutdown evalign SNF 2008-04-04 07:35:10: Monthly lamp change in progress.... Message-ID: Monthly Lamp Change COmpleted. Uniformity = 2.17% Intensity = 14.60Mw/Cm2 From mahnaz at snf.stanford.edu Fri Apr 4 17:08:39 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 4 Apr 2008 17:08:39 -0700 Subject: Shutdown evalign SNF 2008-04-04 17:08:38: not picking up mask Message-ID: When try to load the mask, it goes through all the steps but will not pick up the mask. The system think it has picked it up though. The system has been reset few times, not sure what is wrong now. From gsosa at snf.stanford.edu Mon Apr 7 16:06:37 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 7 Apr 2008 16:06:37 -0700 Subject: Comment evalign SNF 2008-04-07 16:06:36: Update Message-ID: Troubleshot and isolated problem to a vacuum restriction inside of mask plate. There is a 3 inch "L" shaped chanel under the mask plate that is clogged up. Need to clean out the restiction and restore mack vacuum. From lindaw at snf.stanford.edu Thu Apr 10 17:21:23 2008 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 10 Apr 2008 17:21:23 -0700 Subject: Comment evalign SNF 2008-04-10 17:21:22: Any updates on the status of repair of evalign? Message-ID: Would it be possible to get an update on the status of the repair of the suspected vacuum line blockage in the mask plate? Thanks. From shott at stanford.edu Thu Apr 10 18:04:46 2008 From: shott at stanford.edu (John Shott) Date: Thu, 10 Apr 2008 18:04:46 -0700 Subject: Comment evalign SNF 2008-04-10 17:21:22: Any updates on the status of repair of evalign? In-Reply-To: <20080411002123.B7CD360F0A6@smtp3.stanford.edu> References: <20080411002123.B7CD360F0A6@smtp3.stanford.edu> Message-ID: <47FEB92E.6030905@stanford.edu> Linda: Here is the status as I understand it: as Gary indicated the other day, the vacuum line was plugged. Rather than being some form of tubing, the vacuum line is a rather tortuous path milled into the mask plate from one surface and then is made into an enclosed channel by gluing a metal plate on top of it. Gary has cleaned the channel and just completed gluing the "cap" plate back. It is curing overnight. Although I don't know the exact cure time, I expect that Gary will be in a position to test the repair in the morning. It if once again functions as a vacuum line, the plate should be ready to be installed. I must confess to not knowing that machine well enough to know how much alignment effort it takes to reinstall the mask plate .... but if vacuum is restored, the machine should be functional soon. I hope that helps, John From gsosa at snf.stanford.edu Fri Apr 11 17:22:27 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 11 Apr 2008 17:22:27 -0700 Subject: Comment evalign SNF 2008-04-11 17:22:26: Tool Update-4/11 Message-ID: The blockage in the mask top plate has been cleared. The top plate is being installed and set up there are some initialization issues possibly doe to the mask plate position. System is still down. From lindaw at snf.stanford.edu Mon Apr 14 20:26:43 2008 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 14 Apr 2008 20:26:43 -0700 Subject: Comment evalign SNF 2008-04-14 20:26:42: update? Message-ID: EVALIGN has been down for a long time. Can we get an update? Are the problems needing EVG folks to fix? Can the mask plate problems be resolved by SNF Staff? Any estimates on when? Just curious. From shott at snf.stanford.edu Mon Apr 14 21:53:01 2008 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Mon, 14 Apr 2008 21:53:01 -0700 Subject: Comment evalign SNF 2008-04-14 20:26:42: update? Message-ID: Linda: Sorry, we should have provided a better update and, to be honest, I don't yet know enough about the EV align tool to provide great detail. However, Gary's last update on Friday afternoon is, to the best of my knowledge still accurate. Specifically, Gary believes that the mask vacuum problem has been resolved. However, when the mask plate was reinstalled, he believes that there may be some alignment issues with the mask plate that keep the system from properly initializing. I believe that EVG has been contacted but do not know whether this is something that they can talk us through or whether it will take a visit from field service. I will make sure that we post a more detailed update tomorrow. Thanks, John From lindaw at snf.stanford.edu Tue Apr 15 11:17:56 2008 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 15 Apr 2008 11:17:56 -0700 Subject: Comment evalign SNF 2008-04-15 11:17:55: any new updates on evalign status? Message-ID: Please???? From gsosa at snf.stanford.edu Tue Apr 15 16:05:41 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 15 Apr 2008 16:05:41 -0700 Subject: Comment evalign SNF 2008-04-15 16:05:39: Tool Update 4/15/08 Message-ID: Had to remove the top plate again to determine what was causing the plate from binding up and failure to complete initialization. Checked and re-soldered 2 pin connections on the upper ball switch PCB assembly. The solder joints probably deterioreted when we heated up the vacuum channel cover plate with a heat gun( The PC board was very near by). Tested continuity and ball switch operation- All looks good. Also when we re-installed the top plate, we did not tighten down the upper position nut as much as the first installation, which may have caused the binding. Re-assembled system and did full initialization- All OK. Repeated several times with no problem. Finally tested mask vacuum which was the original problem- All OK. Powered up and tuned UV lamp. Intensity is 12.27mw/cm2 and uniformity is 1.7. If all goes well we will green light the tool tomorrow morning after we expose and inspect a test wafer with resolution mask. GS/MV From vilanova at snf.stanford.edu Wed Apr 16 10:20:53 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 16 Apr 2008 10:20:53 -0700 Subject: Shutdown evalign SNF 2008-04-04 17:08:38: not picking up mask Message-ID: Had to remove the top plate again to determine what was causing the plate from binding up and failure to complete initialization. Checked and re-soldered 2 pin connections on the upper ball switch PCB assembly. The solder joints probably deterioreted when we heated up the vacuum channel cover plate with a heat gun( The PC board was very near by). Tested continuity and ball switch operation- All looks good. Also when we re-installed the top plate, we did not tighten down the upper position nut as much as the first installation, which may have caused the binding. Re-assembled system and did full initialization- All OK. Repeated several times with no problem. Finally tested mask vacuum which was the original problem- All OK. Powered up and tuned UV lamp. Intensity is 12.27mw/cm2 and uniformity is 1.7. If all goes well we will green light the tool tomorrow morning after we expose and inspect a test wafer with resolution mask. , JAson has tested the System , exposed wafers and everything looks normal, ok to use. From vilanova at snf.stanford.edu Wed Apr 16 10:22:04 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 16 Apr 2008 10:22:04 -0700 Subject: Comment evalign SNF 2008-04-07 16:06:36: Update Message-ID: Had to remove the top plate again to determine what was causing the plate from binding up and failure to complete initialization. Checked and re-soldered 2 pin connections on the upper ball switch PCB assembly. The solder joints probably deterioreted when we heated up the vacuum channel cover plate with a heat gun( The PC board was very near by). Tested continuity and ball switch operation- All looks good. Also when we re-installed the top plate, we did not tighten down the upper position nut as much as the first installation, which may have caused the binding. Re-assembled system and did full initialization- All OK. Repeated several times with no problem. Finally tested mask vacuum which was the original problem- All OK. Powered up and tuned UV lamp. Intensity is 12.27mw/cm2 and uniformity is 1.7. If all goes well we will green light the tool tomorrow morning after we expose and inspect a test wafer with resolution mask. GS/MV From vilanova at snf.stanford.edu Wed Apr 16 10:22:12 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 16 Apr 2008 10:22:12 -0700 Subject: Comment evalign SNF 2008-04-10 17:21:22: Any updates on the status of repair of evalign? Message-ID: Had to remove the top plate again to determine what was causing the plate from binding up and failure to complete initialization. Checked and re-soldered 2 pin connections on the upper ball switch PCB assembly. The solder joints probably deterioreted when we heated up the vacuum channel cover plate with a heat gun( The PC board was very near by). Tested continuity and ball switch operation- All looks good. Also when we re-installed the top plate, we did not tighten down the upper position nut as much as the first installation, which may have caused the binding. Re-assembled system and did full initialization- All OK. Repeated several times with no problem. Finally tested mask vacuum which was the original problem- All OK. Powered up and tuned UV lamp. Intensity is 12.27mw/cm2 and uniformity is 1.7. If all goes well we will green light the tool tomorrow morning after we expose and inspect a test wafer with resolution mask. GS/MV From vilanova at snf.stanford.edu Wed Apr 16 10:22:20 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 16 Apr 2008 10:22:20 -0700 Subject: Comment evalign SNF 2008-04-11 17:22:26: Tool Update-4/11 Message-ID: Had to remove the top plate again to determine what was causing the plate from binding up and failure to complete initialization. Checked and re-soldered 2 pin connections on the upper ball switch PCB assembly. The solder joints probably deterioreted when we heated up the vacuum channel cover plate with a heat gun( The PC board was very near by). Tested continuity and ball switch operation- All looks good. Also when we re-installed the top plate, we did not tighten down the upper position nut as much as the first installation, which may have caused the binding. Re-assembled system and did full initialization- All OK. Repeated several times with no problem. Finally tested mask vacuum which was the original problem- All OK. Powered up and tuned UV lamp. Intensity is 12.27mw/cm2 and uniformity is 1.7. If all goes well we will green light the tool tomorrow morning after we expose and inspect a test wafer with resolution mask. GS/MV From vilanova at snf.stanford.edu Wed Apr 16 10:22:31 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 16 Apr 2008 10:22:31 -0700 Subject: Comment evalign SNF 2008-04-15 11:17:55: any new updates on evalign status? Message-ID: Had to remove the top plate again to determine what was causing the plate from binding up and failure to complete initialization. Checked and re-soldered 2 pin connections on the upper ball switch PCB assembly. The solder joints probably deterioreted when we heated up the vacuum channel cover plate with a heat gun( The PC board was very near by). Tested continuity and ball switch operation- All looks good. Also when we re-installed the top plate, we did not tighten down the upper position nut as much as the first installation, which may have caused the binding. Re-assembled system and did full initialization- All OK. Repeated several times with no problem. Finally tested mask vacuum which was the original problem- All OK. Powered up and tuned UV lamp. Intensity is 12.27mw/cm2 and uniformity is 1.7. If all goes well we will green light the tool tomorrow morning after we expose and inspect a test wafer with resolution mask. GS/MV From jparker at snf.stanford.edu Wed Apr 16 10:34:16 2008 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Wed, 16 Apr 2008 10:34:16 -0700 Subject: Comment evalign SNF 2008-04-16 10:34:15: Test after 4/15 update Message-ID: -3 test wafers run with resolution mask ran without problems (mask vacuum ok, no software errors or mechanical problems). -Intensity of lamp a bit low: 1 um 3612 does not clear at 1.0s/hard contact. Flat/Left/Right worse than top/center. -1.2s/hard contact for 1um 3612 resolved ok, but there is significant line edge roughness. Recommend no lower than 2.0um resolution (1.5um if you optimize your process). -Dark field does not have as much L.E.R. as light field. From lindaw at snf.stanford.edu Wed Apr 16 14:49:42 2008 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 16 Apr 2008 14:49:42 -0700 Subject: Comment evalign SNF 2008-04-16 14:49:42: system working beautifully Message-ID: Thanks for getting it back up!!! From mahnaz at snf.stanford.edu Wed Apr 30 15:38:29 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 30 Apr 2008 15:38:29 -0700 Subject: Problem evalign SNF 2008-04-30 15:38:29: left focus Message-ID: not able to adjust the left focus on the wafer level. I did adjust the gap an still did not help.