Comment evalign SNF 2008-04-16 10:34:15: Test after 4/15 update

jparker at snf.stanford.edu jparker at snf.stanford.edu
Wed Apr 16 10:34:16 PDT 2008


-3 test wafers run with resolution mask ran without problems (mask vacuum ok, no software errors or mechanical problems).
-Intensity of lamp a bit low: 1 um 3612 does not clear at 1.0s/hard contact. Flat/Left/Right worse than top/center.
-1.2s/hard contact for 1um 3612 resolved ok, but there is significant line edge roughness. Recommend no lower than 2.0um resolution (1.5um if you optimize your process).
-Dark field does not have as much L.E.R. as light field. 




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