From mtan at snf.stanford.edu Sat Aug 16 12:12:34 2008 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Sat, 16 Aug 2008 12:12:34 -0700 Subject: Problem evalign SNF 2008-08-16 12:10:10: cross-mark aligment steps are missing Message-ID: Both back side and bottom side recipes skipped the cross-mark aligment check and went directly into exposure. From emyers at snf.stanford.edu Mon Aug 18 07:32:21 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 18 Aug 2008 07:32:21 -0700 Subject: Problem evalign SNF 2008-08-16 12:10:10: cross-mark aligment steps are missing Message-ID: From emyers at snf.stanford.edu Mon Aug 18 07:33:17 2008 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Mon, 18 Aug 2008 07:33:17 -0700 Subject: Problem evalign SNF 2008-08-18 07:33:16: cross-mark alignment Message-ID: Both back side and bottom side recipes skipped the cross-mark aligment check and went directly into exposure. Cleared by mistake From vilanova at snf.stanford.edu Mon Aug 18 08:12:16 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 18 Aug 2008 08:12:16 -0700 Subject: Problem evalign SNF 2008-08-18 07:33:16: cross-mark alignment Message-ID: Cross mark working fine, the problem is that someone saved the changes to it , now when you use backside it goes to continuos by default, so just change it to cross hair and dont save it and that will take care of the problem, we also have to update the instructions . From gsosa at snf.stanford.edu Mon Aug 18 16:00:30 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 18 Aug 2008 16:00:30 -0700 Subject: Problem evalign SNF 2008-08-18 16:00:28: Power failure recovery Message-ID: Lamp and system powered up and lamp stabilized. Could only achieve lamp intensity of 8.6 Mw/cm2. Lamp is only 3 weeks old. May require a lamp change. Please take test wafers and adjust ezposure times as needed or wait until lamp is replaced and calibrated. From gsosa at snf.stanford.edu Tue Aug 19 13:20:54 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 19 Aug 2008 13:20:54 -0700 Subject: Shutdown evalign SNF 2008-08-19 13:20:54: Replacing UV lamp Message-ID: Intensity too low. Wil replace the UV lamp From gsosa at snf.stanford.edu Tue Aug 19 14:07:26 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 19 Aug 2008 14:07:26 -0700 Subject: Shutdown evalign SNF 2008-08-19 13:20:54: Replacing UV lamp Message-ID: Replaced and set up UV lamp. Intensity= 14.5 mw/cm2, Uniformity + 2.08%. System OK to use. GS/MV From gsosa at snf.stanford.edu Tue Aug 19 14:07:57 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 19 Aug 2008 14:07:57 -0700 Subject: Problem evalign SNF 2008-08-18 16:00:28: Power failure recovery Message-ID: Replaced and set up UV lamp. Intensity= 14.5 mw/cm2, Uniformity + 2.08%. System OK to use. GS/MV From mahnaz at snf.stanford.edu Fri Aug 22 11:55:54 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 22 Aug 2008 11:55:54 -0700 Subject: Problem evalign SNF 2008-08-22 11:55:53: joystick not working Message-ID: Lab member's mask in the system. From iwygant at snf.stanford.edu Fri Aug 22 12:10:06 2008 From: iwygant at snf.stanford.edu (iwygant at snf.stanford.edu) Date: Fri, 22 Aug 2008 12:10:06 -0700 Subject: Problem evalign SNF 2008-08-22 12:10:05: Trackball doesn't respond Message-ID: From vilanova at snf.stanford.edu Fri Aug 22 13:13:32 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 22 Aug 2008 13:13:32 -0700 Subject: Problem evalign SNF 2008-08-22 11:55:53: joystick not working Message-ID: Initialized system , track ball working FIne now, I removed the User mask and I left it on a wipe right next to the EV monitor ( Sorry I couldnt find the mask box) Ok to use. From vilanova at snf.stanford.edu Fri Aug 22 13:13:38 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 22 Aug 2008 13:13:38 -0700 Subject: Problem evalign SNF 2008-08-22 12:10:05: Trackball doesn't respond Message-ID: Initialized system , track ball working FIne now, I removed the User mask and I left it on a wipe right next to the EV monitor ( Sorry I couldnt find the mask box) Ok to use. From mtan at snf.stanford.edu Fri Aug 29 17:42:52 2008 From: mtan at snf.stanford.edu (mtan at snf.stanford.edu) Date: Fri, 29 Aug 2008 17:42:52 -0700 Subject: Problem evalign SNF 2008-08-29 17:42:52: Lamp intesity needs to be calibrated Message-ID: I got different exposure results today comparing to what I got last week. Even when I run the same exposure time on different wafers, the exposure results are not the same.