From bashar at snf.stanford.edu Mon Dec 1 14:29:33 2008 From: bashar at snf.stanford.edu (bashar at snf.stanford.edu) Date: Mon, 1 Dec 2008 14:29:33 -0800 Subject: Shutdown evalign SNF 2008-12-01 14:29:30: Lamp is not calibrated Message-ID: All my recipes went out the window and ruined about two days worth of work! The calibration on this tool should be checked regularly ... When I ran my wafers on KS, everything worked JUST FINE. From gsosa at snf.stanford.edu Mon Dec 1 15:48:14 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 1 Dec 2008 15:48:14 -0800 Subject: Shutdown evalign SNF 2008-12-01 14:29:30: Lamp is not calibrated Message-ID: Checked and replaced UV lamp. Old lamp intensity:8.0 Mw/cm2. New lamp peaked out at 14.2 Mw/cm2. Mean intensity: 14.1 Mw/cm2, Uniformity: 1.4% From lindaw at snf.stanford.edu Wed Dec 10 12:45:44 2008 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 10 Dec 2008 12:45:44 -0800 Subject: Comment evalign SNF 2008-12-10 12:45:44: scoth tape all over the bond chuck Message-ID: some jerk left scotch tape all stuck to the bond chuck. Not cool! I just had to waste 10 min painstakingly peeling it off and cleaning the residue off of the chuck. From lindaw at snf.stanford.edu Wed Dec 10 13:11:55 2008 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 10 Dec 2008 13:11:55 -0800 Subject: Problem evalign SNF 2008-12-10 13:11:54: the top part of bond chuck has no vacuum Message-ID: after laoding my top wafer, and the WEC is complete, I can visually see my wafer slide sideway and rotationally. I have tried reloading three times, same thing happens. Unfortunately, the other chuck is in the evbond, so I can't switch to verify if it is the chuck itself, or the vacuum to the chuck that seems to be the problem. From lindaw at snf.stanford.edu Wed Dec 10 15:04:16 2008 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 10 Dec 2008 15:04:16 -0800 Subject: Comment evalign SNF 2008-12-10 15:04:16: tried other bond chuck to test vacuum Message-ID: My top wafer drifts on the other bond chuck as well. From lindaw at snf.stanford.edu Tue Dec 16 12:40:40 2008 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 16 Dec 2008 12:40:40 -0800 Subject: Problem evalign SNF 2008-12-16 12:40:40: bond chuck surface contamination Message-ID: The least shiny bond chuck appears to have some surface contamination on the polished surface. I hate to say it but it looks like someone actually put tape on it and burned it on. I used this same chuck on Saturday, 12/13 and the polished surface looked fine. The other chuck has apparently been left in the bonder, so I will try and align my wafers with this chuck. From lindaw at snf.stanford.edu Tue Dec 16 12:42:12 2008 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 16 Dec 2008 12:42:12 -0800 Subject: Comment evalign SNF 2008-12-16 12:42:12: make that the shiniest bond chuck with cont. Message-ID: