Shutdown evalign SNF 2008-12-01 14:29:30: Lamp is not calibrated

bashar at snf.stanford.edu bashar at snf.stanford.edu
Mon Dec 1 14:29:33 PST 2008


All my recipes went out the window and ruined about two days worth of work!  The calibration on this tool should be checked regularly ... When I ran my wafers on KS, everything worked JUST FINE.  




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