Problem evalign SNF 2008-12-10 13:11:54: the top part of bond chuck has no vacuum

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Wed Dec 10 13:11:55 PST 2008


after laoding my top wafer, and the WEC is complete, I can visually see  my wafer slide sideway and rotationally.  I have tried reloading three times, same thing happens. Unfortunately, the other chuck is in the evbond, so I can't switch to verify if it is the chuck itself, or the vacuum to the chuck that seems to be the problem.




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