Problem evalign SNF 2008-12-16 12:40:40: bond chuck surface contamination

lindaw at snf.stanford.edu lindaw at snf.stanford.edu
Tue Dec 16 12:40:40 PST 2008


The least shiny bond chuck appears to have some surface contamination on the polished surface.  I hate to say it but it looks like someone actually put tape on it and burned it on.  I used this same chuck on Saturday, 12/13 and the polished surface looked fine.  The other chuck has apparently been left in the bonder, so I will try and align my wafers with this chuck.




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