From vilanova at snf.stanford.edu Thu Jan 3 10:20:33 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 3 Jan 2008 10:20:33 -0800 Subject: Shutdown evalign SNF 2007-12-19 07:20:00: holiday shutdown Message-ID: lamp changed , calibrated. From vilanova at snf.stanford.edu Thu Jan 3 10:21:16 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 3 Jan 2008 10:21:16 -0800 Subject: Comment evalign SNF 2007-10-12 08:34:37: MOnthly lamp change Message-ID: lamp changed, calibrated From vilanova at snf.stanford.edu Thu Jan 3 10:21:35 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 3 Jan 2008 10:21:35 -0800 Subject: Problem evalign SNF 2007-12-16 12:31:00: anodic bond mode wec problem Message-ID: lamp changed , calibrated. From vilanova at snf.stanford.edu Thu Jan 3 10:21:45 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 3 Jan 2008 10:21:45 -0800 Subject: Comment evalign SNF 2007-12-17 07:39:36: ANodic Bonding chuck Message-ID: cleared. From mahnaz at snf.stanford.edu Fri Jan 4 12:08:51 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 4 Jan 2008 12:08:51 -0800 Subject: Problem evalign SNF 2008-01-04 12:08:48: not able to resolve better than 2 um Message-ID: ran 1 um resist both hard and vac. contact not able to resolve better than 2 um in most area and in some area 3 um not resolved. Hard contact behave better than vac. contact. need to clean all belows and check the level. From mahnaz at snf.stanford.edu Wed Jan 9 15:15:58 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 9 Jan 2008 15:15:58 -0800 Subject: Shutdown evalign SNF 2008-01-09 15:15:57: turning off the lamp Message-ID: to measure the lamp house temp. by the EVG FSE. From vilanova at snf.stanford.edu Thu Jan 10 14:28:34 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 10 Jan 2008 14:28:34 -0800 Subject: Shutdown evalign SNF 2008-01-09 15:15:57: turning off the lamp Message-ID: turn lamp back on and calibrated, I will leave it in yellow because I need to do some more Intensity testing. please expose a dummy wafers before just in case you see a decrease of the lamp intesity , if you do please report it inmediatly. From vilanova at snf.stanford.edu Fri Jan 11 08:01:30 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 11 Jan 2008 08:01:30 -0800 Subject: Comment evalign SNF 2008-01-11 08:01:30: Working with EV Eng. Message-ID: Working with EV Engineer On Lamp intensity Issues. From mahnaz at snf.stanford.edu Fri Jan 11 11:14:33 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 11 Jan 2008 11:14:33 -0800 Subject: Problem evalign SNF 2008-01-04 12:08:48: not able to resolve better than 2 um Message-ID: measured the lamp intensity is at 12/MW. Checked the lamp housing temp. is at 169 which is right on the spot. I have adjusted the CHUCK presser to .295 I have ran lots of wafers and the right side wec is slightly out. the exposure for 1um 3612 is at 1.9 s, please make a note of this. I have logged the information on the log next to the system. From mahnaz at snf.stanford.edu Fri Jan 11 11:15:54 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 11 Jan 2008 11:15:54 -0800 Subject: Comment evalign SNF 2008-01-11 08:01:30: Working with EV Eng. Message-ID: Please note that the exposure for 1 um 3612 is at 1.9 seconds. the intensity of the system is at 12MW. I have asked EV to help me with this issue. From mahnaz at snf.stanford.edu Fri Jan 11 11:16:23 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 11 Jan 2008 11:16:23 -0800 Subject: Comment evalign SNF 2007-10-16 14:36:43: i ran a 1 um wafer Message-ID: Please see the earlier emails From closega at snf.stanford.edu Tue Jan 15 20:11:10 2008 From: closega at snf.stanford.edu (closega at snf.stanford.edu) Date: Tue, 15 Jan 2008 20:11:10 -0800 Subject: Comment evalign SNF 2008-01-15 20:11:10: Mask not level with wafer surface Message-ID: I have noticed the mask is not completely level with wafer surface is hard contact (WEC misalignment?). This makes it hard to align properly. Overlay accuracy > 2um. From mahnaz at snf.stanford.edu Wed Jan 16 14:39:58 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 16 Jan 2008 14:39:58 -0800 Subject: Problem evalign SNF 2008-01-16 14:39:58: not able to center the chuck Message-ID: I've noticed yesterday, that the mask holder and chuck are not coordinated so we are not able to center the chuck. mario and I tried to leave it in down position in setting but does not stay. From mahnaz at snf.stanford.edu Thu Jan 17 15:10:49 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 17 Jan 2008 15:10:49 -0800 Subject: Comment evalign SNF 2008-01-17 15:10:48: Mario worked on the system Message-ID: all morning. Mario has written to EVG asking for information.