Problem evalign SNF 2008-01-04 12:08:48: not able to resolve better than 2 um

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Fri Jan 4 12:08:51 PST 2008


ran 1 um resist both hard and vac. contact  not able to resolve better than 2 um in most area and in some area 3 um not resolved.
Hard contact behave better than vac. contact.
need to clean  all belows and check the level.




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