Problem evalign SNF 2008-01-04 12:08:48: not able to resolve better than 2 um

[mahnaz at snf.stanford.edu]

ran 1 um resist both hard and vac. contact  not able to resolve better than 2 um in most area and in some area 3 um not resolved.
Hard contact behave better than vac. contact.
need to clean  all belows and check the level.