Problem evalign SNF 2008-01-04 12:08:48: not able to resolve better than 2 um

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Fri Jan 11 11:14:33 PST 2008


measured the lamp intensity is at 12/MW.
Checked the lamp housing temp. is at 169 which is right on the spot. I have adjusted the CHUCK presser to .295
I have ran lots of wafers and the right side wec is slightly out.
the exposure for 1um 3612 is at 1.9 s, please make a note of this. I have logged the information on the log next to the system.




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